Planar cell ONO cut using in-situ polymer deposition and etch
View Patent ↗A method and manufacture for charge storage layer separation is provided. A layer, such as a polymer layer, is deposited on top of an ONO layer so that the polymer layer is planarized, or approximately planarized. The ONO includes at least a first region and a second region, where the first region is higher than the second region. For example, the first region may be the portion of the ONO that is over the source/drain region, and the second region may be the portion of the ONO that is over the shallow trench. Etching is performed on the polymer layer to expose the first region of the ONO layer, leaving the second region of the ONO unexposed. The etching continues to occur to etch the exposed ONO at the first region so that the ONO layer is etched away in the first region and the second region remains unexposed.
1. A method, comprising:
controlling a parameter of an etching process to deposit a first layer on an oxide-nitride-oxide (ONO) layer, the first layer being at least approximately planarized, wherein the ONO layer includes at least a first region and a second region, and wherein the e first region of the ONO layer is taller than the second region of the ONO layer; and
changing the parameter of the etching process to etch the first layer and the first region of the ONO layer.
2. The method of claim 1 , wherein the first layer and the ONO layer are etched at substantially the same rate.
3. The method of claim 1 , wherein the first layer is a polymer layer.
4. The method of claim 3 , wherein the etching process is a plasma etching process.
5. The method of claim 1 , wherein the etching process uses carbon tetrafluoride chemistry.
6. A method, comprising:
controlling a parameter of an etching process to deposit a first layer on an oxide-nitrlde-oxide (ONO) layer, the first layer being at least approximately planarized, wherein the ONO layer includes at least a first region and a second region, and wherein the first region of the ONO layer is taller than the second region of the ONO layer; and
changing the parameter of the etching process to etch the first layer and the first region of the ONO layer,
wherein the second region of the ONO layer is directly above a source/drain region.
7. The method of claim 6 , wherein:
the ONO layer and the source/drain region form a portion of a flash memory device, and
a nitride portion of the ONO layers is configured to serve as a charge storage layer.
8. The method of claim 6 , wherein:
the first region of the ONO layer is above a shallow trench that includes an oxide, and
the shallow trench provides shallow trench isolation between separate memory cells of a flash memory device.
9. A computer-readable storage medium having instructions stored thereon, execution of which by a processor cause the processor to perform operations, the operations comprising:
controlling a parameter of an etching process to deposit a first layer on an oxide-nitride-oxide (ONO) layer, the first layer being least approximately planarized, wherein the ONO layer includes at least a first region and a second region, and wherein the first region of the ONO layer is taller than the second region of the ONO layer; and
changing the parameter of the etching process to etch the first layer and the first region of the ONO layer.
10. The method of claim 1 , wherein the controlling comprises:
controlling the parameter of the etching process according to an electronic design file.
11. The method of claim 1 , wherein the etching process uses a CH 3 F chemistry.
12. The method of claim 1 , wherein the etching process uses a CH 2 F 2 chemistry.
13. The method of claim 1 , wherein the parameter of the etching process comprises a pressure associated with the etching process.
14. The method of claim 1 , wherein the parameter of the etching process comprises a gas flow associated with the etching process.
15. The method of claim 1 , wherein the parameter of the etching process comprises a temperature associated with the etching process.