Method for fabricating a semiconductor device by considering the extinction coefficient during etching of an interlayer insulating film
View Patent ↗The present invention is directed to a method for manufacturing a semiconductor device by forming an ultraviolet radiation absorbing film of a silicon-rich film above a semiconductor substrate, measuring an extinction coefficient of the ultraviolet radiation absorbing film of a silicon-rich film for ultraviolet radiation, and etching the ultraviolet radiation absorbing film of a silicon-rich film under an etching condition using an oxygen gas flow rate corresponding to the extinction coefficient.
1. A method for manufacturing a semiconductor device, the method comprising:
forming an ultraviolet absorbing film above a semiconductor substrate; and
etching the ultraviolet absorbing film under an etching condition corresponding to an extinction coefficient of said ultraviolet absorbing film.
2. The method for manufacturing a semiconductor device according to claim 1 , wherein the ultraviolet film comprises a silicon-rich film.
3. The method of manufacturing a semiconductor device according to claim 2 , further comprising:
measuring the extinction coefficient of the silicon-rich film for ultraviolet radiation;
forming a first insulating film between the semiconductor substrate and the silicon-rich film;
forming a first opening by etching a part of the first insulating film below an etched area in the silicon-rich film under the etching condition using an oxygen gas flow rate corresponding to the extinction coefficient; and
forming a second opening by etching the first insulating film below the first opening under an etching condition using a predefined oxygen gas flow rate.
4. The method for manufacturing a semiconductor device according to claim 3 , wherein the first insulating film is an oxide film.
5. The method for manufacturing a semiconductor device according to claim 3 , further comprising:
forming a bit line so as to extend in the semiconductor substrate; wherein
forming of the first opening comprises forming the first opening above the bit line, and
forming of the second opening comprises forming the second opening by etching the first insulating film below the first opening so as to run through the silicon-rich film and the first insulating film and expose the bit line.
6. The method for manufacturing a semiconductor device according to claim 5 , further comprising:
forming an oxide-nitride-oxide (ONO) film comprises a charge storage layer between the semiconductor substrate and the first insulating film;
forming an anti-reflection film on the silicon-rich film; wherein
the first insulating film is an interlayer insulating film, and
forming the first opening comprises forming the first opening by etching the anti-reflection film, the ultraviolet absorbing film, and a part of the interlayer insulating film, and
forming the second opening comprises forming the second opening by etching the interlayer insulating film and the ONO film below the first opening so as to run through the anti-reflection film, the ultraviolet absorbing film, the interlayer insulating film, and the ONO film and expose the bit line.
7. The method for manufacturing a semiconductor device according to claim 3 , further comprising:
forming a wiring layer between the semiconductor substrate and the first insulating film; wherein
forming the first opening comprises forming the first opening above the wiring layer, and
forming the second opening comprises forming the second opening by etching the first insulating film below the first opening so as to run through the silicon-rich film and the first insulating film and expose the wiring layer.
8. The method for manufacturing a semiconductor device according to claim 7 , wherein the silicon-rich film is an anti-reflection film.
9. The method for manufacturing a semiconductor device according to claim 5 , further comprising:
forming a plug metal by embedding metal in the second opening.
10. The method for manufacturing a semiconductor device according to claim 2 , wherein the silicon-rich film includes at least one of a silicon-rich oxide film and a silicon-rich nitride film.
11. The method for manufacturing a semiconductor device according to claim 1 , further comprising:
measuring the extinction coefficient of the ultraviolet absorbing film for ultraviolet radiation, wherein the etching condition comprises using an oxygen gas flow rate corresponding to the extinction coefficient.
12. The method for manufacturing a semiconductor device according to claim 2 , wherein etching of the silicon-rich film is performed with a gas containing hydrogen and fluorine.