Microelectronic packages with nanoparticle joining
View Patent ↗A method of making an assembly includes the steps of applying metallic nanoparticles to exposed surfaces of conductive elements of either of or both of a first component and a second component, juxtaposing the conductive elements of the first component with the conductive elements of the second component with the metallic nanoparticles disposed therebetween, and elevating a temperature at least at interfaces of the juxtaposed conductive elements to a joining temperature at which the metallic nanoparticles cause metallurgical joints to form between the juxtaposed conductive elements. The conductive elements of either of or both of the first component and the second component can include substantially rigid posts having top surfaces projecting a height above the surface of the respective component and edge surfaces extending at substantial angles away from the top surfaces thereof.
1. A method of making an assembly, comprising:
(a) applying metallic nanoparticles having long dimensions smaller than 100 nanometers to exposed surfaces of conductive elements of at least one of a first component and a second component, each component being any of a microelectronic element having active semiconductor devices therein, a dielectric element, a semiconductor element, or a microelectronic assembly including a microelectronic element and a substrate attached thereto, wherein the conductive elements of at least one of the first component and the second component include substantially rigid posts having top surfaces projecting a height above the surface of the respective component and edge surfaces extending at substantial angles away from the top surfaces thereof;
(b) juxtaposing the conductive elements of the first component with the conductive elements of the second component with the metallic nanoparticles disposed therebetween, and
(c) elevating a temperature at least at interfaces of the juxtaposed conductive elements to a joining temperature at which the metallic nanoparticles cause metallurgical joints to form between the juxtaposed conductive elements.
2. The method of claim 1 , wherein step (a) is performed by applying the nanoparticles selectively to the exposed surfaces of the conductive elements of at least one of the first or second components.
3. The method of claim 1 , wherein the metal nanoparticles consist essentially of at least one selected from the group consisting of gold, tin, and copper.
4. The method of claim 1 , wherein the joining temperature is above room temperature but substantially below 200° C.
5. The method of claim 1 , wherein at least one of the first or second components is the microelectronic element including active semiconductor devices, wherein the joining temperature is not more than 150° C.
6. The method of claim 1 , wherein the first component is the microelectronic element including active semiconductor devices.
7. The method of claim 6 , wherein the second component is the microelectronic element including active semiconductor devices.
8. The method of claim 6 , wherein the second component is the semiconductor substrate.
9. The method of claim 6 , wherein the second component is the dielectric substrate.
10. The method of claim 1 , wherein at least prior to step (c) the metallic nanoparticles overlie edge surfaces of the posts.
11. The method of claim 1 , wherein the conductive elements of both of the first component and the second component include the substantially rigid posts having top surfaces projecting a height above the surface of the respective component, wherein step (b) is performed with the metallic nanoparticles at least disposed between the top surfaces of the substantially rigid posts of the first and second components.
12. The method of claim 11 , further comprising, after step (c), forming an underfill dielectric region between juxtaposed surfaces of the first and second components.
13. A method of making an assembly, comprising:
(a) applying metallic nanoparticles having long dimensions smaller than 100 nanometers to exposed surfaces of conductive elements of at least one of a first component and a second component, each component being any of a microelectronic element having active semiconductor devices therein, a dielectric element, a semiconductor element, or a microelectronic assembly including a microelectronic element and a substrate attached thereto, wherein the conductive elements of at least one of the first component and the second component include substantially rigid posts having top surfaces projecting a height above the surface of the respective component and edge surfaces extending at substantial angles away from the top surfaces thereof;
(b) juxtaposing the conductive elements of the first component with the conductive elements of the second component with the metallic nanoparticles disposed therebetween,
(c) elevating a temperature at least at interfaces of the juxtaposed conductive elements to a joining temperature at which the metallic nanoparticles cause metallurgical joints to form between the juxtaposed conductive elements; and
(d) prior to step (a), applying a no flow underfill dielectric region between the posts.
14. The method of claim 13 , further comprising, prior to step (a), planarizing the no flow underfill dielectric region with the top surfaces of the posts.
15. The method of claim 14 , further comprising, prior to step (a), etching the top surfaces of the posts such that the top surfaces become recessed below a plane defined by a surface of the no flow underfill dielectric region.
16. A method of making an assembly, comprising:
(a) applying metallic nanoparticles having long dimensions smaller than 100 nanometers to exposed surfaces of conductive elements of at least one of a first component and a second component, each component being any of a microelectronic element having active semiconductor devices therein, a dielectric element, a semiconductor element, or a microelectronic assembly including a microelectronic element and a substrate attached thereto, wherein the conductive elements of at least one of the first component and the second component include substantially rigid posts having top surfaces projecting a height above the surface of the respective component and edge surfaces extending at substantial angles away from the top surfaces thereof;
(b) juxtaposing the conductive elements of the first component with the conductive elements of the second component with the metallic nanoparticles disposed therebetween,
(c) elevating a temperature at least at interfaces of the juxtaposed conductive elements to a joining temperature at which the metallic nanoparticles cause metallurgical joints to form between the juxtaposed conductive elements; and
(d) prior to step (a), forming a first no flow underfill dielectric region between the posts of the first component and forming a second no flow underfill dielectric region between the posts of the second component.
17. The method of claim 16 , wherein step (c) includes joining the first and second no flow underfill dielectric regions.
18. The method of claim 16 , further comprising, prior to step (a), planarizing a surface of the first no flow underfill dielectric region with the top surfaces of the posts of the first component, and planarizing a surface of the second no flow underfill dielectric region with the top surfaces of the posts of the second component.
19. The method of claim 18 , further comprising, prior to step (b), etching the top surfaces of the posts of either or both of the first component and the second component, such that the top surface of each etched post becomes recessed below a plane defined by a surface of the respective no flow underfill dielectric region.