Planarization method for media
View Patent ↗A planarization process may planarize a media disk that has data trenches between data features and larger servo trenches between servo features. A filler material layer is deposited on the media disk and provides step coverage of the trenches. The filler material has data recesses over the data trenches and servo recesses over the servo trenches that must be removed to produce a planar media surface. A first planarization process is used to remove the data recesses and a second planarization process is used to remove the servo recesses.
1. A method comprising:
etching data trenches and servo trenches in a hard magnetic layer of a substrate;
depositing a filler material layer over the magnetic material, the filler material layer filling the data trenches and the servo trenches, an upper surface of the filler material layer having data recesses over the data trenches and servo recesses over the servo trenches;
planarizing the upper surface of the filler material to remove the data recesses and not completely remove the servo recesses;
coating the filler material layer and filling the servo recesses with a resist material and curing the resist material;
etching the substrate with an etch process that selectively etches the filler material at a faster rate than the resist material, the etching continuing until the upper surface of the filler material is substantially planar with the servo recesses; and
removing the resist material remaining over the servo trenches.
2. The method of claim 1 further comprising:
etching the filler material to expose at least a portion of the hard magnetic layer after the removing of the resist material.
3. The method of claim 2 further comprising:
planarizing the top surface of the substrate after the etching of the filler material.
4. The method of claim 3 further comprising:
depositing a layer of protective carbon on the top surface of the substrate.
5. The method of claim 1 wherein the planarizing of the upper surface of the filler material comprises ion beam etch (IBE) processing.
6. The method of claim 1 wherein the planarizing of the upper surface of the filler material etches the filler material at bottom surfaces of the servo trenches.
7. A method comprising:
depositing a filler material layer over a top surface of a substrate having data trenches between magnetic data features and servo trenches between magnetic servo features, an upper surface of the filler material layer having data recesses over the data trenches and servo recesses over the servo trenches;
planarizing the filler material layer until the data recesses are substantially removed and at least some of the servo recesses remain over the servo trenches;
depositing a resist layer on the filler material layer and in the servo recesses;
curing the resist layer;
etching the resist layer with an etch process that selectively etches the resist layer at a slower rate than the filler material layer; and
stopping the etching after the resist layer has been removed from the filler material layer over the data trenches and while portions of the resist layer remains over the servo trenches.
8. The method of claim 7 , wherein the stopping of the etching occurs when the filler material layer over the data trenches is approximately planar with the filler material layer over the servo trenches.
9. The method of claim 7 further comprising:
planarizing the resist layer after the depositing of the resist layer.
10. The method of claim 9 wherein the planarizing the resist layer may be performed by heated reflow of the resist layer.
11. The method of claim 9 wherein the planarizing of the resist layer may be performed by nano-imprint lithography.
12. The method of claim 7 further comprising:
removing the resist layer adjacent the servo trenches; and
planarizing the filler material layer adjacent the data trenches and the servo trenches.
13. The method of claim 7 wherein the planarizing of the filler material includes ion beam etch (IBE) processing.
14. A method comprising:
forming a filler material layer on a top surface of a substrate with data trenches between data features and servo trenches between servo features, an upper surface of the filler material layer having data recesses adjacent the data trenches and servo recesses adjacent the servo trenches;
planarizing the filler material layer;
stopping the planarizing of the filler material after the data recesses in the upper surface of the filler material layer have been removed;
applying resist material to a top surface of the substrate and the servo recesses;
curing the resist material;
selectively etching the top surface of the substrate, the selective etching removing the resist material at a slower rate than the filler material until the filler material layer is substantially planar; and
removing the resist material remaining adjacent to the servo trenches.
15. The method of claim 14 further comprising:
etching the filler material to expose at least a portion of the data features and the servo features after the removing of the resist material.
16. The method of claim 15 further comprising:
planarizing the top surface of the substrate after the etching of the filler material.
17. The method of claim 14 further comprising:
depositing a layer of protective carbon on the top surface of the substrate.
18. The method of claim 14 further comprising:
planarizing the resist material after the applying the resist material.
19. The method of claim 18 wherein the planarizing of the resist material includes heated reflow of the resist material.
20. The method of claim 19 wherein the planarizing of the resist layer includes nano-imprint lithography processing.