A/D converter

1. An A/D converter comprising:

a capacitive DAC, including a positive-side capacitive DAC and a negative-side capacitive DAC operating in a complementary fashion, configured to perform conversion of high-order bits by receiving a differential signal;

a resistive DAC configured to perform conversion of low-order bits;

a resistive correction DAC configured to operate to correct the capacitive DAC; and

a comparator, including a plurality of differential circuits, configured to compare output potentials of the positive-side capacitive DAC and the negative-side capacitive DAC, and wherein

the positive-side capacitive DAC and the negative-side capacitive DAC include first capacitive elements each formed from interconnect layers excluding an uppermost interconnect layer, and

the comparator includes second capacitive elements each provided between adjacent ones of the differential circuits and formed from interconnect layers including the uppermost interconnect layer.

2. The A/D converter as claimed in claim 1 , wherein

the resistive DAC includes a positive-side resistive DAC provided at an output node of the positive-side capacitive DAC and a negative-side resistive DAC provided at an output node of the negative-side capacitive DAC, and

the resistive correction DAC includes a positive-side resistive correction DAC configured to correct an error in the positive-side capacitive DAC, and a negative-side resistive correction DAC configured to correct an error in the negative-side capacitive DAC.

3. The A/D converter as claimed in claim 1 , wherein

the first capacitive elements each have a top electrode connected to the output node of the positive-side or negative-side capacitive DAC, and a bottom electrode connected to one or the other of analog input nodes that is selected between a reference potential and the differential signal.

4. The A/D converter as claimed in claim 3 , wherein

the first capacitive elements each have a cross section such that the top electrode is sandwiched by the bottom electrode when viewed in a thickness direction of a semiconductor substrate on which the A/D converter is fabricated.

5. The A/D converter as claimed in claim 4 , wherein

the first capacitive elements each have a structure such that the bottom electrode is arranged around the top electrode when viewed in a direction parallel to a surface of the semiconductor substrate.

6. The A/D converter as claimed in claim 5 , wherein

a connection fixed to a constant potential is arranged around the bottom plate when viewed in the direction parallel to the surface of the semiconductor substrate.

7. The A/D converter as claimed in claim 1 , wherein

the second capacitive elements each have a first electrode connected to an output node of a preceding-stage differential circuit in an array of the plurality of differential circuits, and a second electrode connected to an input node of a succeeding-stage differential circuit which receives an output from the preceding-stage differential circuit.

8. The A/D converter as claimed in claim 7 , wherein

the preceding-stage differential circuit is a first-stage differential circuit in the array of the plurality of differential circuits, and the succeeding-stage differential circuit is a second-stage differential circuit in the array of the plurality of differential circuits.

9. The A/D converter as claimed in claim 8 , wherein

the second capacitive elements each have a cross section such that the second electrode is sandwiched by the first electrode when viewed in a thickness direction of a semiconductor substrate on which the A/D converter is fabricated.

10. The A/D converter as claimed in claim 9 , wherein

the second capacitive elements each have a structure such that the first electrode is arranged around the second electrode when viewed in a direction parallel to a surface of the semiconductor substrate.

11. The A/D converter as claimed in claim 8 , wherein

the comparator further includes third capacitive elements each provided between adjacent ones of the plurality of differential circuits excluding the first-stage and second-stage differential circuits, and

the third capacitive elements are each constructed from a poly-diffusion capacitor.

12. The A/D converter as claimed in claim 1 , wherein

the comparator includes an amplitude limiting device provided between output nodes of at least the first-stage differential circuit in the array of the plurality of differential circuits.

13. The A/D converter as claimed in claim 12 , wherein

the amplitude limiting device comprises a diode-connected first nMOS transistor and a second nMOS transistor diode-connected in reverse polarity relationship to the first nMOS transistor between the output nodes of the first-stage differential circuit.

14. The A/D converter as claimed in claim 1 , wherein

the differential circuits forming the comparator each comprise:

a first pMOS transistor whose source is connected to a high-potential power supply line;

second and third pMOS transistors whose sources are connected to a drain of the first pMOS transistor;

a first load device connected between a low-potential power supply line and a drain of the second pMOS transistor; and

a second load device connected between the low-potential power supply line and a drain of the third pMOS transistor, and wherein

the drain of each of the second and third pMOS transistors provides an output of the differential circuit.

15. The A/D converter as claimed in claim 1 , wherein

in the array of the plurality of differential circuits in the comparator, each differential circuit supplies a larger bias current than its succeeding differential circuit.