Integrated circuit having a semiconductor substrate with barrier layer
An integrated circuit having a semiconductor substrate with a barrier layer is disclosed. The arrangement includes a semiconductor substrate and a metallic element. A carbon-based barrier layer is disposed between the semiconductor substrate and the metallic element.
1. An integrated circuit having a semiconductor arrangement comprising:
a conductive structure comprising polycrystalline silicon or highly doped silicon;
a metallic element; and
a carbon-based barrier layer disposed between the conductive structure and the metallic element and in direct contact with at least the conductive structure, the carbon-based barrier layer completely covering a border between the conductive structure and the metallic element and being doped so as to be electrically conductive to pass electrical signals from the conductive structure to the metallic element.
2. The integrated circuit of claim 1 , further comprising:
an oxide layer arranged between the carbon-based barrier layer and the metallic element.
3. The integrated circuit of claim 2 , wherein the oxide layer comprises iridium or iridium oxide.
4. The integrated circuit of claim 1 , wherein the carbon-based barrier layer physically separates the conductive structure from the metallic element.
5. The integrated circuit of claim 1 , wherein the specific electric resistance of the carbon-based barrier layer is lower than the specific electric resistance of the conductive structure.
6. The integrated circuit of claim 1 , wherein the thermal conductivity of the carbon-based barrier layer is higher than the thermal conductivity of the conductive structure.