Wire bonding apparatus and wire bonding method
View Patent ↗Provided is a wire bonding apparatus including: a wire cutting unit configured to cut a wire by bonding the wire using a capillary and then moving the capillary and a first clamper upward while the first clamper remains closed; and a wire extending unit configured to extend a tail wire from a tip end of the capillary by moving the capillary upward and then moving the capillary and the first clamper upward in a state in which the first clamper is opened and a second clamper is closed. The wire bonding apparatus having such a structure effectively prevents the wire from falling out and bending.
1. A wire bonding method of a wire bonding apparatus comprising:
a capillary configured to bond a wire inserted through the capillary to a bonding target;
a first clamper configured to move in conjunction with the capillary; and
a second clamper disposed in line with the first clamper along an extending direction of the wire inserted through the capillary,
the method comprising:
a wire cutting step of cutting the wire by bonding the wire using the capillary in a state in which the first clamper is closed and the second clamper is opened, and then moving the capillary and the first clamper upward while the first clamper remains closed and the second clamper remains opened; and
a wire extending step of extending the wire from a tip end of the capillary by moving the capillary upward, and then moving the capillary and the first clamper upward in a state in which the first clamper is opened and the second clamper is closed.
2. The wire bonding method according to claim 1 , wherein in the wire cutting step, when bonding the wire, the tip end of the capillary is pressed against the bonding target and the tip end of the capillary is caused to vibrate by turning an ultrasonic vibrator on while the capillary is caused to perform a scrubbing operation.
3. The wire bonding method according to claim 1 , wherein in the wire cutting step, when bonding the wire, the tip end of the capillary is pressed against the bonding target and the tip end of the capillary is caused to vibrate by turning an ultrasonic vibrator on.
4. The wire bonding method according to claim 1 , wherein in the wire cutting step, the capillary and the first clamper are moved upward while the tip end of the capillary is caused to vibrate by turning an ultrasonic vibrator on so that the wire is completely cut.
5. The wire bonding method according to claim 1 , wherein in the wire extending step, the capillary and the first clamper are moved upward while the tip end of the capillary is caused to vibrate by turning an ultrasonic vibrator on so that the wire is smoothly inserted into a hole in the capillary.