Performance optically coated semiconductor devices and related methods of manufacture
View Patent ↗The present application disclosed various embodiments of improved performance optically coated semiconductor devices and the methods for the manufacture thereof and includes at least one semiconductor wafer having at least a first surface, a first layer of low density, low index of refraction optical material applied to at least the first surface of the semiconductor wafer, and a multi-layer optical coating applied to the first layer of low density, low index of refraction material, the multi-layer optical coating comprising alternating layers of low density, low index of refraction materials and high density, high index of refraction materials.
1. A semiconductor device having an optical coating selectively applied thereto, comprising:
at least one semiconductor wafer having at least a first surface:
at least one low-stress-low density porous columnar film layer formed of at least one low density, low index of refraction optical material applied to at least the first surface of the semiconductor wafer;
a multi-layer optical coating applied to the first layer of low density, low index of refraction material, the multi-layer optical coating comprising alternating layers of low density, low index of refraction materials and high density high index of refraction materials.
2. The device of claim 1 wherein the low density, low index of refraction material comprises silicon dioxide.
3. The device of claim 1 wherein the low density, low index of refraction material comprises at least one material selected from the group consisting of aluminum oxide, silicon monoxide, magnesium fluoride, and thorium fluoride.
4. The device of claim 1 wherein the high density, high index of refraction material comprises niobium dioxide.
5. The device of claim 1 wherein the high density, high index of refraction material comprises at least one material selected from the group consisting of titanium dioxide, tantalum pentoxide, hafnium dioxide, zirconium dioxide, aluminum nitride, zinc sulfide, and zinc selenide.
6. The device of claim 1 wherein the semiconductor wafer defines one or more discreet semiconductor devices.
7. The device of claim 6 wherein the semiconductor devices comprises one or more optical detectors.
8. The device of claim 1 wherein the first layer has a thickness of about 150 nm to about 800 nm.
9. The device of claim 1 wherein the layers forming the multi-layer optical coating have a thickness of about 10 nm to about 1000 nm.