COMPACT TID HARDENING NMOS DEVICE AND FABRICATION PROCESS
A radiation-hardened transistor is formed in a p-type semiconductor body having an active region doped to a first level and surrounded by a dielectric filled shallow trench isolation region. N-type source/drain regions are disposed in the active region and spaced apart to define a channel. A gate is disposed above the channel, and is self-aligned with the source/drain regions. First and second p-type regions are disposed in the p-type semiconductor body on either side of one of the source/drain regions and are doped to a second level higher than the first doping level. The first and second p-type regions are self aligned with and extend outwardly from a first side edge of the gate. The ends of the gate extend past the first and second p-type regions.
1 . A radiation-hardened transistor comprising:
a p-type semiconductor body;
an active region disposed in the p-type semiconductor body doped to a first level and surrounded by a dielectric filled shallow trench isolation region;
first and second n-type source/drain regions disposed in the active region and spaced apart to define a channel therebetween;
a gate disposed above and insulated from the channel, first and second ends of the gate extending past ends of the channel over the p-type semiconductor body;
a first p-type extension region disposed in the p-type semiconductor body and doped to a second level higher than the first doping level, the first p-type extension region self aligned with and extending outwardly from a side edge of the gate on a first side of one of the source/drain regions, the first end of the gate extending past the first p-type extension region; and
a second p-type extension region disposed in the p-type semiconductor body and doped to the second level, the second p-type extension region self aligned with and extending outwardly from a side edge of the gate on a second side of one of the source/drain regions opposite the first side, the second end of the gate extending past the second p-type extension region.
2 . The radiation-hardened transistor of claim 1 wherein the gate is self-aligned with the first and second n-type source/drain regions.
3 . The radiation-hardened transistor of claim 1 wherein the first and second p-type regions extend outwardly from the same side edge of the gate.
4 . The radiation-hardened transistor of claim 1 wherein the first and second p-type regions extend outwardly from opposite side edges of the gate.
5 . The radiation-hardened transistor of claim 1 wherein the active region forms a half of a closed ring.
6 . The radiation-hardened transistor of claim 1 wherein the active region forms a full closed ring.
7 . A method for fabricating a radiation-hardened transistor comprising:
defining an active area in which the radiation-hardened transistor will be located;
forming a gate dielectric layer over the active area;
depositing and defining a polysilicon gate for the radiation-hardened transistor;
forming source/drain regions for the radiation-hardened transistor; and
forming p+ extension regions for the radiation-hardened transistor.
8 . The method of claim 7 wherein defining the active area in which the radiation-hardened transistor will be located comprises defining the active area in a p-well formed in a semiconductor substrate.
8 . The method of claim 7 wherein defining the active area in which the radiation-hardened transistor will be located comprises forming STI trenches and filling the STI trenches with a dielectric material.
10 . The method of claim 7 wherein forming p+ extension regions for the radiation-hardened transistor comprises forming first and second p+ extension regions on a same side edge of the polysilicon gate.
11 . The method of claim 7 wherein forming p+ extension regions for the radiation-hardened transistor comprises:
forming a first p+ extension region on a first side edge of the polysilicon gate; and
forming a second p+ extension region on a second side edge of the polysilicon gate opposite the first side edge.