IP Library › Granted Patent US 10,508,343
Granted Patent Utility
US 10,508,343 · Confirmation No. 8202

ETCHING METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Inventor: Shirou OZAKI
Applicant: FUJITSU LIMITED
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2025-12-17 OATH Oath or Declaration filed 18 View
2025-02-12 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2025-02-12 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2025-01-20 PA.. Power of Attorney 2 View
2025-01-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-01-20 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2019-11-26 ISSUE.NTF Issue Notification 1 View
2019-11-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2019-11-13 WFEE Fee Worksheet (SB06) 2 View
2019-11-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-10-08 APP.FILE.REC Filing Receipt 4 View
2019-08-15 NOA Notice of Allowance and Fees Due (PTOL-85) 7 View
2019-08-15 SRFW Search information including classification, databases and other search related notes 2 View
2019-08-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 3 View
2019-08-15 BIB Bibliographic Data Sheet 1 View
2019-08-15 SRNT Examiner's search strategy and results 7 View
2019-01-16 RCEX Request for Continued Examination (RCE) 3 View
2019-01-16 WFEE Fee Worksheet (SB06) 2 View
2019-01-16 N417 Electronic Filing System Acknowledgment Receipt 3 View
2019-01-16 A.PE Preliminary Amendment 1 View
2019-01-16 CLM Claims 3 View
2019-01-16 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2019-01-16 WFEE Fee Worksheet (SB06) 1 View
2018-10-16 CTFR Final Rejection 7 View
2018-10-16 892 List of references cited by examiner 1 View
2018-10-16 SRFW Search information including classification, databases and other search related notes 1 View
2018-10-16 SRNT Examiner's search strategy and results 6 View
2018-07-31 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2018-07-31 CLM Claims 2 View
2018-07-31 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2018-07-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-07-31 WFEE Fee Worksheet (SB06) 1 View
2018-05-15 CTNF Non-Final Rejection 7 View
2018-05-15 892 List of references cited by examiner 1 View
2018-05-15 SRNT Examiner's search strategy and results 5 View
2018-05-15 SRFW Search information including classification, databases and other search related notes 1 View
2017-06-07 WFEE Fee Worksheet (SB06) 1 View
2017-06-07 RCEX Request for Continued Examination (RCE) 3 View
2017-06-07 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2017-06-07 CLM Claims 2 View
2017-06-07 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2017-06-07 WFEE Fee Worksheet (SB06) 2 View
2017-06-07 N417 Electronic Filing System Acknowledgment Receipt 3 View
2017-03-07 CTFR Final Rejection 6 View
2017-03-07 892 List of references cited by examiner 1 View
2017-03-07 SRFW Search information including classification, databases and other search related notes 1 View
2017-02-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2017-02-08 CLM Claims 2 View
2017-02-08 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2017-02-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-02-08 WFEE Fee Worksheet (SB06) 1 View
2016-12-15 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2016-11-14 CTNF Non-Final Rejection 6 View
2016-11-14 892 List of references cited by examiner 1 View
2016-11-14 1449 List of References cited by applicant and considered by examiner 4 View
2016-11-14 1449 List of References cited by applicant and considered by examiner 4 View
2016-11-14 1449 List of References cited by applicant and considered by examiner 4 View
2016-11-14 1449 List of References cited by applicant and considered by examiner 4 View
2016-11-14 BIB Bibliographic Data Sheet 1 View
2016-11-14 SRFW Search information including classification, databases and other search related notes 1 View
2016-11-14 1449 List of References cited by applicant and considered by examiner 4 View
2016-11-14 CTNF Non-Final Rejection 6 View
2016-11-14 892 List of references cited by examiner 1 View
2016-11-14 BIB Bibliographic Data Sheet 1 View
2016-11-14 SRFW Search information including classification, databases and other search related notes 1 View
2016-11-14 1449 List of References cited by applicant and considered by examiner 4 View
2016-11-14 1449 List of References cited by applicant and considered by examiner 4 View
2016-11-14 1449 List of References cited by applicant and considered by examiner 4 View
2016-11-14 1449 List of References cited by applicant and considered by examiner 4 View
2016-11-14 1449 List of References cited by applicant and considered by examiner 4 View
2016-10-20 ELC. Response to Election / Restriction Filed 3 View
2016-10-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-10-12 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 3 View
2016-09-22 CTRS Requirement for Restriction/Election 6 View
2015-04-27 OATH Oath or Declaration filed 3 View
2014-11-17 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2014-11-17 FOR Foreign Reference 9 View
2014-11-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-11-17 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2014-11-17 FOR Foreign Reference 8 View
2014-11-17 FOR Foreign Reference 25 View
2014-11-17 FOR Foreign Reference 18 View
2014-11-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-09-17 TRAN.LET Transmittal Letter 1 View
2014-09-17 PA.. Power of Attorney 2 View
2014-09-17 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2014-09-17 ADS Application Data Sheet 6 View
2014-09-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-05-15 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2014-05-15 FOR Foreign Reference 11 View
2014-05-15 FOR Foreign Reference 14 View
2014-05-15 FOR Foreign Reference 24 View
2014-05-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-04-03 NTC.PUB Notice of Publication 1 View
2014-03-07 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2014-03-07 FOR Foreign Reference 35 View
2014-03-07 FOR Foreign Reference 75 View
2014-03-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-01-21 TRAN.LET Transmittal Letter 1 View
2014-01-21 ADS Application Data Sheet 6 View
2014-01-21 PA.. Power of Attorney 2 View
2014-01-21 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2014-01-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-12-25 PD.FILED.E Priority Documents electronically retrieved by USPTO from a participating IP Office 28 View
2013-12-23 APP.FILE.REC Filing Receipt 3 View
2013-12-23 N572 Response - Re: Informal Power of Attorney (PTOL-308) 1 View
2013-12-23 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2013-12-23 WFEE Fee Worksheet (SB06) 1 View
2013-12-05 PA.. Power of Attorney 2 View
2013-12-05 TRNA Transmittal of New Application 3 View
2013-12-05 ADS Application Data Sheet 4 View
2013-12-05 SPEC Specification 21 View
2013-12-05 CLM Claims 3 View
2013-12-05 ABST Abstract 1 View
2013-12-05 DRW Drawings-only black and white line drawings 12 View
2013-12-05 A.PE Preliminary Amendment 1 View
2013-12-05 SPEC Specification 2 View
2013-12-05 CLM Claims 2 View
2013-12-05 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2013-12-05 OATH Oath or Declaration filed 2 View
2013-12-05 136A Authorization for Extension of Time all replies 3 View
2013-12-05 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2013-12-05 WFEE Fee Worksheet (SB06) 2 View
2013-12-05 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
Patent No.
US 10,508,343
App. No.
14/097,721
Filed
2013-12-05
Granted
2019-12-17
Pub. No.
US20140090782A1
Art Unit
2437
PTA
0 days