Semiconductor device having a multilayer interconnection structure
A semiconductor device includes first and second conductor patterns embedded in a first interlayer insulation film and a third conductor pattern embedded in a second interlayer insulation film, the third conductor pattern including a main part and an extension part, the extension part being electrically connected to the first conductor pattern by a first via-plug, the extension part having a branched pattern closer to the main part compared with the first conductor pattern, the branched pattern making a contact with the second conductor pattern via a second via-plug, each of the main part, extension part including the branched pattern, first via-plug and second via-plug forming a damascene structure.
1. A semiconductor device comprising:
a substrate;
a first conductor pattern and a second conductor pattern, that is separated from said first conductor pattern, formed above said substrate;
a third conductor pattern formed above said first conductor pattern and said second conductor pattern;
an extension part, that is narrower than said third conductor pattern, formed to extend in a layer identical to said third conductor pattern above said first conductor pattern and said second conductor pattern and connected to a first edge of said third conductor pattern in a plan view;
a first via-plug formed on said first conductor pattern and under said extension part;
a dummy extension part, that is narrower than said third conductor pattern, formed to extend in a layer identical to said third conductor pattern above said first conductor pattern and said second conductor pattern and connected to a first edge of said third conductor pattern in a plan view; and
a second via-plug formed on said second conductor pattern under said dummy extension part.
2. The semiconductor device as claimed in claim 1 , further comprising:
a first interlayer insulation film formed above said substrate; and
a second interlayer insulation film formed above said first interlayer insulation film,
wherein said first conductor pattern and said second conductor pattern are formed in said first interlayer insulation film,
said third conductor pattern, said extension part and said dummy extension part are formed in said second interlayer insulation film.
3. The semiconductor device as claimed in claim 2 , wherein said third conductor pattern, said extension part, said dummy extension part, said first via-plug and said second via-plug form a dual damascene structure together with said second interlayer insulation film.
4. The semiconductor device as claimed in claim 1 , wherein a distance from said third conductor pattern to said first via-plug in said extension part is longer than a distance from said third conductor pattern to said second via-plug in said dummy extension part.
5. The semiconductor device as claimed in claim 1 , wherein a plurality of said dummy extension parts are connected to said first edge of said third conductor pattern in a plan view.
6. The semiconductor device as claimed in claim 4 , wherein a plurality of said second via-plugs are formed under said plurality of said dummy extension parts respectively and on said second conductor pattern.
7. The semiconductor device as claimed in claim 1 , wherein said extension part and said dummy extension part are located out of the said third conductor pattern in a plan view.
8. A semiconductor device comprising:
a substrate;
a first conductor pattern formed above said substrate;
a second conductor pattern formed above said first conductor pattern;
an extension part, that is narrower than said second conductor pattern, formed to extend in a layer identical to said second conductor pattern above said first conductor pattern and connected to a first edge of said second conductor pattern in a plan view;
a first via-plug formed on said first conductor pattern and under said extension part; and
a dummy extension part, that is narrower than said second conductor pattern, formed to extend in a layer identical to said second conductor pattern above said first conductor pattern and connected to said first edge of said second conductor pattern in a plan view.
9. The semiconductor device as claimed in claim 8 , further comprising:
a first interlayer insulation film formed above said substrate; and
a second interlayer insulation film formed above said first interlayer insulation film,
wherein said first conductor pattern is formed in said first interlayer insulation film,
said second conductor pattern, said extension part and said dummy extension part are formed in said second interlayer insulation film.
10. The semiconductor device as claimed in claim 9 , wherein said second conductor pattern, said extension part and said via-plug form a dual damascene structure together with said second interlayer insulation film.
11. The semiconductor device as claimed in claim 8 , wherein said extension part and said dummy extension part are located out of the said second conductor pattern in a plan view.
12. The semiconductor device as claimed in claim 8 , wherein a length of said dummy extension part is shorter than a length of said extension.
13. A semiconductor device comprising:
a substrate;
a first conductor pattern and second conductor pattern, that is separated from said first conductor pattern, formed above said substrate;
a third conductor pattern formed above said first conductor pattern and said second conductor pattern;
an extension part, that is narrower than said third conductor pattern, formed to extend in a layer identical to said third conductor pattern above said first conductor pattern and said second conductor pattern and connected to a first edge of said third conductor pattern in a plan view;
a first via-plug formed on said first conductor pattern and under said extension part;
a second via-plug, that is smaller than said first via-plug, located between said second conductor pattern and said extension part, said second via-plug being nearer to said third conductor pattern than said first via-plug in a plan view.
14. The semiconductor device as claimed in claim 13 , wherein said second conductor pattern includes a part that does not overlap said extension part in a plan view.
15. The semiconductor device as claimed in claim 13 , further comprising:
a first interlayer insulation film formed above said substrate; and
a second interlayer insulation film formed above said first interlayer insulation film,
wherein said first conductor pattern and said second conductor pattern are formed in said first interlayer insulation film,
said third conductor pattern and said extension part are formed in said second interlayer insulation film.
16. The semiconductor device as claimed in claim 15 , wherein said third conductor pattern, said extension part said first via-plug and said second via-plug form a dual damascene structure together with said second interlayer insulation film.