Granted Patent B2

US 9,503,295 · App. 14/440,187 · Granted Nov 22, 2016

Abstract

Claims (39)

1. A drive-mode oscillator module for generating at least one proof-mass drive signal for use within a micro-electro-mechanical system (MEMS) device, the drive-mode oscillator module comprising:

at least one gain control component arranged to receive at least one proof-mass motion measurement signal, receive at least one reference amplitude signal, compare the at least one proof-mass motion measurement signal to the at least one reference amplitude signal, generate a digital modulation control signal based at least partly on the at least one proof-mass motion measurement signal, and output the digital modulation control signal comprising an indication of whether the at least one proof-mass motion measurement signal exceeds the at least one reference amplitude signal; and

at least one modulation component arranged to receive the digital modulation control signal, and to output at least one proof-mass drive signal, wherein the at least one modulation component is arranged to digitally modulate the at least one proof-mass drive signal based at least partly on the received digital modulation control signal.

2. A drive-mode oscillator module for generating at least one proof-mass drive signal for use within a micro-electro-mechanical system (MEMS) device, the drive-mode oscillator module comprising:

at least one gain control component arranged to receive at least one proof-mass motion measurement signal, and to generate a digital modulation control signal based at least partly on the at least one proof-mass motion measurement signal;

at least one modulation component arranged to receive the digital modulation control signal, and to output at least one proof-mass drive signal, wherein the at least one modulation component is arranged to digitally modulate the at least one proof-mass drive signal based at least partly on the received digital modulation control signal; and

at least one phase component arranged to:

receive the at least one proof-mass motion measurement signal;

detect a proof-mass motion phase; and

output to the at least one modulation component a digital phase signal,

wherein the at least one modulation component is further arranged to output the at least one proof-mass drive signal comprising a phase based at least partly on the received digital phase signal output by the at least one phase component.

3. The drive-mode oscillator module of claim 2 , wherein the at least one phase component is arranged to output the digital phase signal comprising a 90° phase shift relative to the detected proof-mass motion phase.

4. The drive-mode oscillator module of claim 3 , wherein the at least one phase component comprises a comparator arranged to:

receive a differential proof-mass motion measurement signal;

compare a first differential component of the differential proof-mass motion measurement signal to a second differential component of the differential proof-mass motion measurement signal; and

output a phase detection signal based at least partly on the comparison of the first and second differential components of the differential proof-mass motion measurement signal, wherein the phase component further comprises a phase shift component arranged to:

receive the phase detection signal output by the comparator;

apply a 90° phase shift to the phase detection signal; and

output the digital phase signal comprising the phase shifted phase detection signal.

5. The drive-mode oscillator module of claim 2 , wherein the modulation component comprises at least one level shifter arranged to receive the digital phase signal output by the at least one phase component, apply a voltage level shift to the received digital phase signal, and to output at least one proof-mass drive signal based at least partly on the level shifted digital phase signal.

6. The drive-mode oscillator module of claim 5 , wherein the at least one level shifter is configurable to apply a configurable voltage level shift to the received digital phase signal.

7. The drive-mode oscillator module of claim 1 , wherein the modulation component is arranged to apply amplitude shift keying (ASK) modulation to the at least one proof-mass drive signal based at least partly on the received digital modulation control signal.

8. The drive-mode oscillator module of claim 7 , wherein the modulation component is arranged to:

output a 90° phase shifted oscillating proof-mass drive signal upon the digital modulation control signal comprising an indication that the at least one proof-mass motion measurement signal is less than the at least one reference amplitude signal; and

output a constant voltage proof-mass drive signal upon the digital modulation control signal comprising an indication that the at least one proof-mass motion measurement signal exceeds the at least one reference amplitude signal.

9. The drive-mode oscillator module of claim 1 , wherein the modulation component is arranged to apply binary phase shift keying (BPSK) modulation to the at least one proof-mass drive signal based at least partly on the received digital modulation control signal.

10. The drive-mode oscillator module of claim 9 , wherein the modulation component is arranged to:

output a 90° phase shifted oscillating proof-mass drive signal upon the digital modulation control signal comprising an indication that the at least one proof-mass motion measurement signal is less than the at least one reference amplitude signal; and

output an inverted form of the 90° phase shifted oscillating proof-mass drive signal upon the digital modulation control signal comprising an indication that the at least one proof-mass motion measurement signal exceeds the at least one reference amplitude signal.

11. The drive-mode oscillator module of claim 1 , wherein the drive-mode oscillator module further comprises at least one analogue start-up component selectively arranged to generate a proof-mass drive signal for driving a proof-mass of the MEMS device during a start-up phase of the MEMS device.

12. A drive-mode oscillator module for generating at least one proof-mass drive signal for use within a micro-electro-mechanical system (MEMS) device, the drive-mode oscillator module comprising:

at least one gain control component arranged to receive at least one proof-mass motion measurement signal, and to generate a digital modulation control signal based at least partly on the at least one proof-mass motion measurement signal;

at least one modulation component arranged to receive the digital modulation control signal, and to output at least one proof-mass drive signal, wherein the at least one modulation component is arranged to digitally modulate the at least one proof-mass drive signal based at least partly on the received digital modulation control signal; and

at least one analogue start-up component selectively arranged to generate a proof-mass drive signal for driving a proof-mass of the MEMS device during a start-up phase of the MEMS device, wherein the at least one analogue start-up component comprises:

an integrator component arranged to receive the at least one proof-mass motion measurement signal and apply a 90° phase shift thereto; and

an amplifier component arranged to receive the phase shifted proof-mass motion measurement signal, and to output a proof-mass drive signal based at least partly on the phase shifted proof-mass motion measurement signal.

13. The drive-mode oscillator module of claim 1 , wherein the drive-mode oscillator module comprises at least one capacitance to voltage component arranged to receive a signal comprising an indication of a capacitance change of a MEMS drive measurement unit (DMU) and to convert the received indication of a capacitance change to the proof-mass motion measurement signal.

14. The drive-mode oscillator module of claim 1 implemented within an integrated circuit device comprising at least one die within a single integrated circuit package.

15. A micro-electro-mechanical system (MEMS) device comprising at least one drive-mode oscillator module according to claim 1 .

Assignments (15)