IP Library Granted Patent US 9,595,513
Granted Patent B2
US 9,595,513 · App. 14/556,450 · Granted Mar 14, 2017

Proximity coupling of interconnect packaging systems and methods

Inventors: Rich Fogal (Boise, ID); Owen R. Fay (Meridian, ID)
Assignee: Micron Technology, Inc.
H01L25/18H01L23/3128H01L23/481H01L23/5386H01L24/17H01L24/81H01L25/0652H01L25/0657H01L25/50H01L2224/0401H01L2224/0557H01L2224/05567H01L2224/05568H01L2224/16145H01L2224/16227H01L2224/32225H01L2224/48091H01L2224/48227H01L2224/73204H01L2224/81815H01L2224/92125H01L2224/92247H01L2225/06513H01L2225/06517H01L2225/06527H01L2225/06531H01L2225/06541H01L2225/06562H01L2225/06589H01L2924/14H01L2924/1431H01L2924/1434H01L2924/1436H01L2924/15311H01L2924/163H01L2924/16251H01L2924/2064
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Quick Facts
Patent No.
US 9,595,513
App. No.
14/556,450
Granted
Mar 14, 2017
Kind
B2
Abstract

Proximity coupling interconnect packaging systems and methods. A semiconductor package assembly comprises a substrate, a first semiconductor die disposed adjacent the substrate, and a second semiconductor die stacked over the first semiconductor die. There is at least one proximity coupling interconnect between the first semiconductor die and the second semiconductor die, the proximity coupling interconnect comprising a first conductive pad on the first coupling face on the first semiconductor die and a second conductive pad on a second coupling face of the second semiconductor die, the second conductive pad spaced apart from the first conductive pad by a gap distance and aligned with the first conductive pad. An electrical connector is positioned laterally apart from the proximity coupling interconnect and extends between the second semiconductor die and the substrate, the position of the electrical connector defining the alignment of the first conductive pad and the second conductive pad.

Claims (35)

1. A semiconductor package assembly comprising:

a substrate having bond pads;

a first semiconductor die disposed adjacent the substrate, the first semiconductor die having a first coupling face that faces away from the substrate;

a second semiconductor die having a second coupling face and bond pads at the second coupling face, the second semiconductor die stacked on the first semiconductor die such that the second coupling face faces the first coupling face;

a proximity coupling interconnect between the first semiconductor die and the second semiconductor die, the proximity coupling interconnect comprising a first conductive pad on the first coupling face and a second conductive pad on the second coupling face spaced from the first conductive pad by a gap distance and aligned with the first conductive pad; and

an electrical connector positioned laterally apart from the proximity coupling interconnect and extending between one of the bond pads of the second semiconductor die and one of the bond pads of the substrate, the position of the electrical connector defining the alignment of the first conductive pad and the second conductive pad,

wherein the first coupling face has a first passivation layer extending beyond a height of the first conductive pad and having a first opening exposing the first conductive pad,

wherein the second coupling face has a second passivation layer extending beyond a height of the second conductive pad and having a second opening exposing the second conductive pad,

wherein the first and second passivation layers define the gap distance between the first conductive pad and the second conductive pad, and wherein the proximity coupling interconnect comprises a capacitive coupling interconnect or an inductive coupling interconnect.

2. The semiconductor package assembly of claim 1 , wherein the electrical connector comprises a solder interconnect and the proximity coupling interconnect comprises a capacitive coupling interconnect.

3. The semiconductor package assembly of claim 1 , wherein the electrical connector comprises a solder interconnect and the proximity coupling interconnect comprises an inductive coupling interconnect.

4. The semiconductor package assembly of claim 1 , wherein gap distance is about 1 microns to about 10 microns.

5. The semiconductor package assembly of claim 1 , wherein the first semiconductor die comprises a memory die.

6. The semiconductor package assembly of claim 1 , wherein the second semiconductor die comprises a logic die.

7. The semiconductor package assembly of claim 1 , further comprising a spacer positioned on the substrate and having a third coupling face that faces away from the substrate, the spacer being spaced laterally from the first semiconductor die, and the second semiconductor die being stacked over the spacer such that the second coupling face overlaps a portion of the third coupling face.

8. The semiconductor package assembly of claim 7 , wherein the assembly has a plurality of first semiconductor dies, and the spacer comprises one of the first semiconductor dies.

9. The semiconductor package assembly of claim 8 , further comprising a second proximity coupling interconnect between the second semiconductor die and each of the first semiconductor dies, and wherein each of the proximity coupling interconnects comprises a first conductive pad on one of the first semiconductor dies aligned with a corresponding second conductive pad in the second semiconductor dies.

10. The semiconductor package assembly of claim 1 , further comprising a thermal lid coupled to the substrate and enclosing the first semiconductor die and the second semiconductor die.

11. The semiconductor package assembly of claim 10 , further comprising a thermal fill material disposed between the thermal lid and the first semiconductor die and the second semiconductor die.

12. The semiconductor package assembly of claim 1 , further comprising an underfill material disposed between the second semiconductor die and the substrate, the underfill material surrounding the electrical connector.

13. The semiconductor package assembly of claim 1 , wherein the electrical connector provides electrical communication between second semiconductor die and the substrate.

14. The semiconductor package assembly of claim 1 , wherein the second semiconductor die overlaps only a portion of the first semiconductor die, and another portion of the second semiconductor die extends laterally beyond the first semiconductor die and over at least a set of bond pads on the substrate.

15. A semiconductor package assembly comprising:

a first semiconductor die having a first coupling face;

a second semiconductor die having a second coupling face that faces the first coupling face, the second coupling face having a first portion that overlaps the first coupling face and a second portion that does not overlap the first coupling face;

a proximity coupling interconnect between the first semiconductor die and the second semiconductor die, the proximity coupling interconnect comprising a first pad on the first coupling face and a second pad on the second coupling face, wherein the first pad is aligned with and spaced apart from the second pad by an open space; and

a spacing structure projecting from the second portion of the second coupling face of the second semiconductor die, the spacing structure defining a gap between the first pad and the second pad,

wherein the first coupling face has a first passivation layer extending beyond a height of the first pad and having a first opening exposing the first pad,

wherein the second coupling face has a second passivation layer extending beyond a height of the second pad and having a second opening exposing the second pad, and wherein the proximity coupling interconnect comprises a capacitive coupling interconnect or an inductive coupling interconnect.

16. The semiconductor package assembly of claim 15 , wherein the spacing structure comprises a solder interconnect spaced laterally apart from the proximity coupling interconnect and extending between the second portion of the second coupling face and a substrate.

17. The semiconductor package assembly of claim 15 , wherein the spacing structure comprises a solder interconnect extending between the second portion of the second coupling face and a third semiconductor die comprising a through-silicon via (TSV), the solder interconnect providing electrical communication between the second semiconductor die and the TSV of the third semiconductor die.

18. The semiconductor package assembly of claim 17 , wherein the first semiconductor die is stacked over a fourth semiconductor die, wherein the third semiconductor die and the fourth semiconductor die are disposed over a substrate and laterally spaced apart from one another.

19. The semiconductor package assembly of claim 15 , wherein the proximity coupling interconnect comprises a capacitive coupling interconnect.

20. The semiconductor package assembly of claim 15 , wherein the proximity coupling interconnect comprises an inductive coupling interconnect.

21. The semiconductor package assembly of claim 15 , wherein first pad is spaced from the second pad by a distance from about 1 microns to about 10 microns.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 1, 2014
From: FOGAL, RICH; FAY, OWEN R.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 034286/0848 →
Continuity (1)
Related Publication 20160155729A1 · Jun 2, 2016