Package for high-power semiconductor devices
View Patent ↗Methods and apparatuses for forming a package for high-power semiconductor devices are disclosed herein. A package may include a plurality of distinct thermal spreader layers disposed between a die and a metal carrier. Other embodiments are described and claimed.
1. A method of forming a package for high power semiconductor devices, the method comprising:
providing a first thermal spreader layer on a semiconductor material;
providing a second thermal spreader layer on a metal carrier; and
coupling the first thermal spreader layer to the second thermal spreader layer with an adhesive, wherein the first thermal spreader layer and the second thermal spreader layer are sandwiched between the semiconductor material and the metal carrier.
2. The method of claim 1 , wherein the semiconductor material comprises gallium nitride.
3. The method of claim 1 , wherein said providing of the first thermal spreader layer comprises:
forming the first thermal spreader layer on a wafer of the semiconductor material.
4. The method of claim 3 , further comprising:
singulating dies from the wafer after said coupling of the first thermal spreader layer with the second thermal spreader layer.
5. The method of claim 3 , further comprising:
singulating dies from the wafer prior to said coupling of the first thermal spreader layer with the second thermal spreader layer.
6. The method of claim 3 , wherein said providing of the adhesive further comprises:
printing a pattern of the adhesive on the second thermal spreader layer.
7. The method of claim 1 , wherein said providing of the first thermal spreader layer comprises:
forming the second thermal spreader layer on individual dies of the semiconductor material.
8. The method of claim 7 , further comprising:
placing the individual dies and formed second thermal spreader layer on the first thermal spreader layer formed on the metal carrier.
9. The method of claim 1 , wherein the first and second thermal spreader layers comprise silicon carbide, diamond, or aluminum nitride.
10. The method of claim 1 , wherein the first and second thermal spreader layers comprise diamond and are formed by chemical vapor deposition.
11. The method of claim 1 , wherein the adhesive is a sintered silver or sintered copper.
12. The method of claim 1 , wherein said coupling of the first thermal layer with the second thermal layer comprises:
placing the first and second thermal layers adjacent to one another and curing the adhesive.
13. The method of claim 1 , wherein the metal carrier comprises copper or aluminum.
14. The method of claim 1 , wherein said providing of the first spreader layer comprises forming the first spreader layer to a thickness between 25 and 500 microns; and said forming of the second spreader layer comprises forming the second spreader layer to a thickness between 25 and 500 microns.