IP Library Granted Patent US 9,425,262
Granted Patent B2
US 9,425,262 · App. 14/671,495 · Granted Aug 23, 2016

Configuration of portions of a power device within a silicon carbide crystal

Inventor: Andrei Konstantinov (Sollentuna, SE)
Assignee: FAIRCHILD SEMICONDUCTOR CORPORATION
H01L29/1608H01L29/045H01L29/0619H01L29/872
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,425,262
App. No.
14/671,495
Granted
Aug 23, 2016
Kind
B2
Abstract

In one general aspect, an apparatus can include a silicon carbide (SiC) crystal having a top surface aligned along a plane and the SiC crystal having an off-orientation direction. The apparatus including a semiconductor device defined within the SiC crystal. The semiconductor device having an outer perimeter where the outer perimeter has a first side aligned along the off-orientation direction and a second side aligned along a direction non-parallel to the off-orientation direction. The first side of the outer perimeter of the semiconductor device having a length longer than the second side of the outer perimeter of the semiconductor device.

Claims (29)

1. An apparatus for a silicon carbide (SiC) crystal semiconductor device, comprising:

a silicon carbide (SiC) crystal having a top surface aligned along a plane, the SiC crystal having an off-orientation direction from a basal (0001) plane; and

a semiconductor device having at least a portion defined within the SiC crystal, the semiconductor device being a vertically oriented device, the semiconductor device having an outer perimeter, the outer perimeter having a first side aligned along the off-orientation direction and a second side aligned along a direction non-parallel to the off-orientation direction, the first side of the outer perimeter of the semiconductor device having a length longer than the second side of the outer perimeter of the semiconductor device.

2. The apparatus of claim 1 , wherein the second side is aligned along a direction substantially orthogonal to a direction of a direction of propagation of a stacking fault.

3. The apparatus of claim 1 , wherein the semiconductor device is a vertically oriented device having a minimum rated voltage of 400 Volts and a minimum rated current of 4 Amperes.

4. The apparatus of claim 1 , wherein the outer perimeter of the semiconductor device is defined by a region free of minority carriers when the semiconductor device is operating.

5. The apparatus of claim 1 , wherein the outer perimeter of the semiconductor device is defined by a termination region of the semiconductor device.

6. The apparatus of claim 1 , wherein the first side has a length that is at least 1.5 longer than a length of the second side.

7. The apparatus of claim 1 , wherein the first side is orthogonal to the second side.

8. The apparatus of claim 1 , wherein an entirety of the first side is longer than the entirety of the second side.

9. An apparatus for a silicon carbide (SiC) crystal semiconductor device, comprising:

a first portion of a semiconductor device having at least a portion defined within a silicon carbide crystal and having a length greater than a width, the length of the first portion of the semiconductor device being aligned along an off-orientation direction from the basal (0001) plane of the silicon carbide crystal, the semiconductor device being a vertical device;

a second portion of a semiconductor device having a length greater than a width, the length of the second portion of the semiconductor device being aligned parallel to the first portion of the semiconductor device; and

a termination region disposed at least partially around the first portion of the semiconductor device and at least partially around the second portion of the semiconductor device.

10. The apparatus of claim 9 , wherein the first semiconductor device is separated from the second semiconductor device by a region excluding a drift region such that a stacking fault included in the first semiconductor device is prevented from propagating to the second semiconductor device.

11. The apparatus of claim 9 , wherein the first portion of the semiconductor device is electrically coupled to the second portion of the semiconductor device via an interconnect.

12. The apparatus of claim 9 , wherein the first semiconductor device is separated from the second semiconductor device by a stacking fault separation region substantially excluding minority carriers that facilitate propagation of a stacking fault.

13. The apparatus of claim 9 , wherein the first semiconductor device is separated from the second semiconductor device by a stacking fault separation region disposed outside of an active region of the first portion and outside of the an active region of the second portion.

14. The apparatus of claim 9 , wherein the termination region has an outer perimeter different that has an aspect ratio different than an aspect ratio of the first portion or the aspect ratio of the second portion.

15. An apparatus for a silicon carbide (SiC) crystal semiconductor device, comprising:

a first portion of a semiconductor device having at least a portion defined within an epitaxial layer of a silicon carbide crystal and having a length greater than a width, the length of the first portion of the semiconductor device being aligned along an off-orientation direction from a basal plane of the silicon carbide crystal, the semiconductor device being a vertically-oriented device;

a second portion of a semiconductor device having a length greater than a width, the length of the second portion of the semiconductor device being aligned parallel to the first portion of the semiconductor device; and

a stacking fault separation region disposed between the first portion and the second portion, the stacking fault separation region having a width equal to or greater than a thickness of the epitaxial layer.

16. The apparatus of claim 15 , wherein the width of the separation region is greater than two times the thickness of the epitaxial layer.

17. The apparatus of claim 15 , wherein the width of the separation region is greater than a drift region of the semiconductor device included in the epitaxial layer.

18. The apparatus of claim 15 , wherein the width of the separation region is greater than two times a drift region of the semiconductor device included in the epitaxial layer.

19. The apparatus of claim 15 , further comprising:

a termination region disposed at least partially around the first portion of the semiconductor device and at least partially around the second portion of the semiconductor device.

20. The apparatus of claim 15 , wherein the stacking fault separation region is defined by a region free of minority carriers when the semiconductor device is operating.

Assignments (6)
SECURITY INTEREST Recorded Jul 13, 2023
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; GTAT CORPORATION
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 064271/0971 →
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RECORDED AT REEL 046410, FRAME 0933 Recorded Jun 22, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064072/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 3, 2021
From: FAIRCHILD SEMICONDUCTOR CORPORATION
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 057694/0374 →
PATENT SECURITY AGREEMENT Recorded Jun 22, 2018
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 046410/0933 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 14, 2017
From: TRANSIC AB
To: FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 041994/0042 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 31, 2015
From: KONSTANTINOV, ANDREI
To: TRANSIC AB
Reel/Frame 035298/0108 →
Continuity (2)
Provisional Application 62004513 · May 29, 2014
Related Publication 20150349062A1 · Dec 3, 2015