Package including a semiconductor die and a capacitive component
View Patent ↗In one general aspect, a method can include forming a redistribution layer on a substrate using a first electroplating process, and forming a conductive pillar on the redistribution layer using a second electroplating process. The method can include coupling a semiconductor die to the redistribution layer, and can include forming a molding layer encapsulating at least a portion of the redistribution layer and at least a portion of the conductive pillar.
1. An apparatus, comprising:
a first molding layer;
a second molding layer;
a substrate disposed between the first molding layer and the second molding layer;
a first capacitive plate disposed in the first molding layer on a first side of the substrate;
a second capacitive plate disposed in the second molding layer on a second side of the substrate; and
a semiconductor die disposed in the first molding layer and including a semiconductor device, the semiconductor device being electrically coupled to the first capacitive plate.
2. The apparatus of claim 1 , wherein the semiconductor die is a first semiconductor die and the semiconductor device is a first semiconductor device, the first capacitive plate and the second capacitive plate defining at least a portion of a first capacitor,
the apparatus further comprising:
a third capacitive plate disposed in the first molding layer on the first side of the substrate, the second capacitive plate and the third capacitive plate defining at least a portion of a second capacitor; and
a second semiconductor die including a second semiconductor device, the second semiconductor device being electrically coupled to the third capacitive plate.
3. The apparatus of claim 1 , wherein the semiconductor die is a first semiconductor die and the semiconductor device is a first semiconductor device,
the apparatus further comprising:
a second semiconductor die disposed in the first molding layer and including a second semiconductor device; and
a conductive via disposed in the substrate.
4. The apparatus of claim 1 , wherein the first capacitive plate and the second capacitive plate are included in a capacitive component, the semiconductor die is a first semiconductor die and the semiconductor device is a first semiconductor device,
the apparatus further comprising:
a second semiconductor die including a second semiconductor device, the second semiconductor die disposed in the first molding layer, the first semiconductor device being electrically isolated from the second semiconductor device via the capacitive component.
5. The apparatus of claim 1 , further comprising:
a first inductive component; and
a second inductive component disposed in the second molding layer, the first inductive component and the second inductive component collectively defining a transformer.
6. The apparatus of claim 1 , wherein the substrate includes a ceramic.
7. The apparatus of claim 1 , further comprising:
a plate coupled to at least a portion of the semiconductor die.
8. The apparatus of claim 1 , further comprising:
an inductive component, the second molding layer includes a magnetic substance, the inductive component including a conductive element and including at least a portion of the magnetic substance.
9. The apparatus of claim 1 , wherein the apparatus is included in an electronic device.
10. An apparatus, comprising:
a first redistribution layer disposed on a first side of a substrate, the first redistribution layer including a first redistribution layer portion and a second redistribution layer portion;
a conductive pillar coupled to the first redistribution layer portion of the first redistribution layer;
a semiconductor die including a semiconductor device coupled to the second redistribution layer portion of the first redistribution layer;
a second redistribution layer disposed on a second side of the substrate, the second redistribution layer including a capacitive plate of a capacitive component;
a first molding layer encapsulating at least a portion of the semiconductor die on the first side of the substrate and encapsulating at a least a portion of the first redistribution layer; and
a second molding layer disposed on the second side of the substrate.
11. The apparatus of claim 10 , wherein the capacitive plate is a first capacitive plate of the capacitive component, the first redistribution layer including a portion defining a second capacitive plate of the capacitive component, the substrate having a portion defining a dielectric between the first capacitive plate and the second capacitive plate.
12. The apparatus of claim 10 , further comprising:
a surface plating layer having a portion aligned along a surface of the first molding layer, the first redistribution layer and the conductive pillar having a combined thickness substantially equal to a thickness of the first molding layer between the substrate and the surface plating layer.
13. The apparatus of claim 10 , further comprising:
a surface plating layer having a portion aligned along a surface of the first molding layer,
the first redistribution layer and the conductive pillar extending between the substrate and the surface plating layer.
14. The apparatus of claim 10 , wherein the capacitive plate is a first capacitive plate, the second redistribution layer portion of the first redistribution layer is a second capacitive plate.
15. The apparatus of claim 10 , wherein the second redistribution layer includes a first portion defining the capacitive plate and a second portion defining a portion of an inductive component.
16. An apparatus, comprising:
a substrate;
a first molding layer disposed on a first side of the substrate;
a second molding layer disposed on a second side of the substrate;
a first semiconductor die disposed within the first molding layer;
a second semiconductor die disposed within the first molding layer;
a first capacitive component electrically coupled to the first semiconductor die; and
a second capacitive component electrically coupled to the second semiconductor die, the first capacitive component and the second capacitive component having a common capacitive plate disposed in the second molding layer on the second side of the substrate.
17. The apparatus of the claim 16 , wherein the first semiconductor die includes a driver circuit and the second semiconductor die includes a comparator circuit.
18. The apparatus of the claim 17 , wherein the first semiconductor die includes a driver circuit configured to communicate with the comparator circuit using one-way communication.
19. The apparatus of the claim 16 , wherein the first semiconductor die includes a high voltage semiconductor device.