IP Library Granted Patent US 9,865,426
Granted Patent B2
US 9,865,426 · App. 15/056,330 · Granted Jan 9, 2018

Compact, configurable power supply for energizing ozone-producing cells

Inventors: Ken Tran (North Chelmsford, MA); Feng Tian (Salem, NH); Xing Chen (Lexington, MA); Franklin Lee (Framingham, MA)
Assignee: MKS Instruments, Inc.
H01J37/248C01B13/115C01B2201/90
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Quick Facts
Patent No.
US 9,865,426
App. No.
15/056,330
Granted
Jan 9, 2018
Kind
B2
Abstract

Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

Claims (22)

1. A power system for powering at least one ozone-producing cell, comprising:

a rectifier configured to rectify an AC input voltage;

a bus capacitor coupled in parallel to the rectifier, the bus capacitor configured to develop an unregulated DC voltage in response to rectified AC input voltage;

a power converter coupled to the bus capacitor and configured to produce a high-frequency AC output voltage in response to the unregulated DC voltage, when coupled to the at least one ozone-producing cell;

a first sensor configured to measure a voltage across the bus capacitor;

a second sensor configured to measure a current between the rectifier and the bus capacitor; and

a controllable current-limiting resistance coupled between the rectifier and the bus capacitor, the controllable current limiting resistance also in communication with each of the first and second sensors and configured to provide a current limiting resistance during initialization and a substantial short circuit once initialized.

2. The power system of claim 1 , wherein the controllable current-limiting resistance comprises a series resistor coupled in parallel with a controllable switch, the controllable switch in communication with the first and second sensors, being open during initialization and closed once initialized.

3. The power system of claim 2 , wherein the controllable switch comprises a semiconductor device.

4. The power system of claim 2 , wherein the series resistor comprises a positive temperature coefficient (PTC) thermistor.

5. The power system of claim 1 , wherein the controllable current-limiting resistance is part of an inrush current protection circuit which provides inrush current protection in the power converter at power-up.

6. A method for supplying power to at least one ozone-producing cell, comprising:

rectifying an AC input voltage;

charging by the rectified AC input voltage a bus capacitor to a DC operating voltage;

converting the DC operating voltage to a high-frequency AC voltage when applied to the at least one ozone-producing cell;

differentiating between an initialization state of the bus capacitor and an initialized state of the bus capacitor, the differentiating comprising measuring a voltage across the bus capacitor to determine a measured voltage and measuring a current flowing into the bus capacitor to determine a measured current; and

varying a series resistance in response to the measured voltage and the measured current, the series resistance limiting current to the bus capacitor during initialization, otherwise allowing unrestricted current when initialized.

7. The method of claim 6 , wherein the differentiating further comprises:

comparing the measured voltage to a voltage threshold; and

comparing the measured current to a current threshold; wherein,

if the measured voltage is above the threshold voltage and the measured current is below the current threshold then the initialized state is indicated.

8. The method of claim 6 , wherein the differentiating and varying steps are part of an inrush current protection process which provides inrush current protection at power-up.

Assignments (9)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 1, 2017
From: TRAN, KEN; TIAN, FENG; CHEN, XING; LEE, FRANKLIN
To: MKS INSTRUMENTS, INC.
Reel/Frame 044277/0137 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
Continuity (2)
Division 13432415 · Mar 28, 2012
Related Publication 20160181063A1 · Jun 23, 2016