Semiconductor device packages
View Patent ↗A semiconductor device package that incorporates a combination of ceramic, organic, and metallic materials that are coupled using silver is provided. The silver is applied in the form of fine particles under pressure and a low temperature. After application, the silver forms a solid that has a typical melting point of silver, and therefore the finished package can withstand temperatures significantly higher than the manufacturing temperature. Further, since the silver is an interfacial material between the various combined materials, the effect of differing material properties between ceramic, organic, and metallic components, such as coefficient of thermal expansion, is reduced due to low temperature of bonding and the ductility of the silver.
1. A semiconductor device comprising:
an insulative frame having a top surface and a bottom surface;
a conductive metal lead coupled to the top surface of the insulative frame;
a base plate having a top surface with an interface region;
sintered silver between the bottom surface of the insulative frame and the interface region on the top surface of the base plate, wherein the sintered silver directly couples the bottom surface of the insulative frame to the top surface of the base plate;
a semiconductor device die coupled to a die attach region of the base plate;
an electrical contact between the semiconductor device die and the conductive metal lead; and
an air cavity cap, wherein the air cavity cap is coupled to the top surface of the insulative frame and to the conductive metal lead.
2. The semiconductor device of claim 1 , wherein:
the insulative frame is formed from a ceramic material.
3. The semiconductor device of claim 1 , wherein:
the insulative frame includes a metallization layer on the bottom surface.
4. The semiconductor device of claim 1 , wherein:
the insulative frame is metalized with a material selected from copper, nickel/gold, TiNiAu, TiW, and gold.
5. The semiconductor device of claim 1 , wherein:
the base plate comprises solid copper.
6. The semiconductor device of claim 1 , wherein:
the base plate comprises at least one material selected from a copper-molybdenum-copper (CuMoCu) laminate, a copper, copper-molybdenum, copper (Cu(CuMo)Cu) laminate, and copper-tungsten (CuW).
7. The semiconductor device of claim 1 , further comprising:
plating comprising a gold-containing material.
8. The semiconductor device of claim 1 , wherein:
the conductive metal lead is coupled to the top surface of the insulative frame with the sintered silver.
9. The semiconductor device of claim 8 , wherein:
the conductive metal lead comprises solid copper.
10. The semiconductor device of claim 1 , wherein further comprising:
the semiconductor device die is coupled, with the sintered silver, to the die attach region of the base plate.
11. The semiconductor device package of claim 1 , further comprising:
a semiconductor device die coupled to a die attach region of the base plate with the sintered silver.
12. A semiconductor device comprising:
an insulative ceramic frame having a top surface and a bottom surface;
a conductive metal lead coupled to the top surface of the insulative ceramic frame;
a solid copper base plate having a top surface with an interface region;
sintered silver between the bottom surface of the ceramic frame and the interface region on the top surface of the base plate, wherein the sintered silver directly couples the bottom surface of the ceramic frame to the top surface of the base plate;
a semiconductor device die coupled to a die attach region of the base plate;
an electrical contact between the semiconductor device die and the conductive metal lead; and
an air cavity cap, wherein the air cavity cap is coupled to the top surface of the insulative frame and to the conductive metal lead.
13. The semiconductor device of claim 12 , wherein:
the ceramic frame includes a metallization layer on the bottom surface.
14. The semiconductor device of claim 12 , wherein:
the insulative frame is metalized with a material selected from copper, nickel/gold, TiNiAu, TiW, and gold.
15. The semiconductor device of claim 12 , wherein:
the conductive metal lead is coupled, with the sintered silver, to the top surface of the ceramic frame.
16. The semiconductor device of claim 15 , wherein:
the conductive metal lead comprises solid copper.
17. The semiconductor device of claim 12 , wherein further comprising:
the semiconductor device die is coupled, with the sintered silver, to the die attach region of the base plate.