Semiconductor device and method of forming ultra thin multi-die face-to-face WLCSP
A semiconductor device has a first semiconductor die stacked over a second semiconductor die which is mounted to a temporary carrier. A plurality of bumps is formed over an active surface of the first semiconductor die around a perimeter of the second semiconductor die. An encapsulant is deposited over the first and second semiconductor die and carrier. A plurality of conductive vias is formed through the encapsulant around the first and second semiconductor die. A portion of the encapsulant and a portion of a back surface of the first and second semiconductor die is removed. An interconnect structure is formed over the encapsulant and the back surface of the first or second semiconductor die. The interconnect structure is electrically connected to the conductive vias. The carrier is removed. A heat sink or shielding layer can be formed over the encapsulant and first semiconductor die.
1. A method of making a semiconductor device, comprising:
providing a first semiconductor die;
disposing a second semiconductor die over the first semiconductor die with an active surface of the second semiconductor die oriented toward an active surface of the first semiconductor die;
forming a first interconnect structure around the first semiconductor die or second semiconductor die;
depositing an encapsulant over the first semiconductor die and second semiconductor die such that the encapsulant is between the first semiconductor die and the second semiconductor die; and
forming a first build-up interconnect structure on a first surface of the encapsulant and on an non-active surface of the first semiconductor die or second semiconductor die, the first build-up interconnect structure having at least one conductive layer and at least one insulating layer adjacent the conductive layer.
2. The method of claim 1 , wherein the first interconnect structure includes a plurality of bumps or conductive vias.
3. The method of claim 1 , further including removing a portion of the encapsulant to the first interconnect structure.
4. The method of claim 1 , further including forming a second build-up interconnect structure over a second surface of the encapsulant opposite the first surface of the encapsulant.
5. The method of claim 1 , further including disposing a heat sink on the first semiconductor die or second semiconductor die.
6. The method of claim 1 , further including forming a shielding layer over the first semiconductor die or second semiconductor die.
7. The method of claim 1 , further including disposing an electrical component over the first build-up interconnect structure.
8. A semiconductor device, comprising:
a first semiconductor die;
a plurality of bumps formed over an active surface of the first semiconductor die;
a second semiconductor die disposed over the first semiconductor die between the bumps with an active surface of the second semiconductor die oriented toward the active surface of the first semiconductor die;
an encapsulant deposited around the first semiconductor die, second semiconductor die, and bumps, and between the first semiconductor die and the second semiconductor die;
a conductive via formed through the encapsulant around the first semiconductor die and second semiconductor die; and
a first build-up interconnect structure formed on a first surface of the encapsulant and on a non-active surface of the first semiconductor die or second semiconductor die, the first build-up interconnect structure having at least one conductive layer and at least one insulating layer adjacent the conductive layer.
9. The semiconductor device of claim 8 , wherein the bumps are exposed from the encapsulant.
10. The semiconductor device of claim 8 , wherein the conductive via is exposed from the encapsulant.
11. The semiconductor device of claim 8 , further including a second build-up interconnect structure formed over a second surface of the encapsulant opposite the first surface of the encapsulant.
12. The semiconductor device of claim 8 , further including a heat sink disposed on the first semiconductor die or second semiconductor die.
13. The semiconductor device of claim 8 , further including a shielding layer formed over the first semiconductor die or second semiconductor die.
14. A semiconductor device, comprising:
a first semiconductor die;
a second semiconductor die disposed over the first semiconductor die with an active surface of the second semiconductor die oriented toward the active surface of the first semiconductor die;
a first interconnect structure formed around the first semiconductor die or second semiconductor die;
an encapsulant deposited around the first semiconductor die and second semiconductor die and between the first semiconductor die and the second semiconductor die; and
a first build-up interconnect structure formed on a first surface of the encapsulant and on a non-active surface of the first semiconductor die or second semiconductor die, the first build-up interconnect structure having at least one conductive layer and at least one insulating layer adjacent the conductive layer.
15. The semiconductor device of claim 14 , wherein the first interconnect structure includes a plurality of bumps.
16. The semiconductor device of claim 14 , wherein the first interconnect structure includes a conductive via.
17. The semiconductor device of claim 14 , further including a second build-up interconnect structure formed over a second surface of the encapsulant opposite the first surface of the encapsulant.
18. The semiconductor device of claim 14 , further including a heat sink disposed on the first semiconductor die or second semiconductor die.
19. The semiconductor device of claim 14 , further including an electrical component disposed over the second interconnect structure.
20. A semiconductor device, comprising:
a first semiconductor die;
a second semiconductor die disposed over the first semiconductor die;
an encapsulant deposited around the first semiconductor die and second semiconductor die and between the first semiconductor die and the second semiconductor die;
a conductive via formed through the encapsulant around the first semiconductor die and second semiconductor die; and
a first build-up interconnect structure formed on a first surface of the encapsulant and on a surface of the first semiconductor die or second semiconductor die, the first build-up interconnect structure having at least one conductive layer and at least one insulating layer adjacent the conductive layer.
21. The semiconductor device of claim 20 , further including a plurality of bumps over an active surface of the first semiconductor die.
22. The semiconductor device of claim 21 , wherein the second semiconductor die is disposed over the first semiconductor die between the bumps with an active surface of the second semiconductor die oriented toward the active surface of the first semiconductor die.
23. The semiconductor device of claim 20 , further including a second build-up interconnect structure formed over a second surface of the encapsulant opposite the first surface of the encapsulant.
24. The semiconductor device of claim 20 , further including a heat sink disposed on the first semiconductor die or second semiconductor die.
25. The semiconductor device of claim 20 , further including a shielding layer formed over the first semiconductor die or second semiconductor die.