IP Library Granted Patent US 11,285,443
Granted Patent B2
US 11,285,443 · App. 16/304,900 · Granted Mar 29, 2022

Coated porous polymeric membranes

Inventors: Jad Ali Jaber (Westford, MA); Saksatha Ly (Lexington, MA); James Hamzik (Billerica, MA); Testu Kohyama (Tokyo, JP)
Assignee: ENTEGRIS, INC.
B01D67/0088B01D69/02B01D71/26B01D71/78B01D71/82B01J20/267B01J20/28035B01J20/3208B01J20/3282C07C45/786C08J5/2243G03F7/027B01D2323/30B01D2325/14B01D2325/16C08J2333/26
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,285,443
App. No.
16/304,900
Granted
Mar 29, 2022
Kind
B2
Abstract

The present disclosure provides a porous polymeric membrane that is coated with a cross-linked polymerized monomer. The coating on the porous polymeric membrane has a charge when it is immersed in an organic liquid. The coated porous polymeric membrane, a filter utilizing the membrane, and a method for treating an organic liquid used for photoresist with the coated porous polymeric membrane to remove metal contaminants from the organic liquid are disclosed.

Claims (17)

1. A coated porous polymeric membrane comprising a porous polymeric membrane having a polymer coating on surfaces thereof, wherein the polymer coating is cross-linked and not grafted to the porous polymeric membrane surfaces and has a polymerized monomer comprising a positive charge in an organic liquid,

wherein the coating is cross-linked with a cross-linking agent selected from the group consisting of 1,6-hexanediol diacrylate, tetraethylene glycol diacrylate, 1,1,1-trimethylolpropane triacrylate, and combinations thereof and

wherein the porous polymeric membrane is a polyolefin membrane having a bubble point, measured from the pressure required to displace ethoxy-nonafluorobutane through pores of the porous polymeric membrane, in a range of 4-160 psi.

2. The porous membrane of claim 1 , wherein the monomer comprising the positive charge in the organic liquid is selected from a group consisting of 2-(dimethylamino)ethyl hydrochloride acrylate, [2-(acryloyloxy)ethyl]trimethylammonium chloride, 2-aminoethyl methacrylate hydrochloride, N-(3-aminopropyl) methacrylate hydrochloride, 2-(dimethylamino)ethyl methacrylate hydrochloride, [3-(methacryloylamino)propyl] trimethylammonium chloride solution, [2-(methacryloyloxy)ethyl]trimethylammonium chloride, acrylamidopropyl trimethylammonium chloride, 2-aminoethyl methacrylamide hydrochloride, N-(2-aminoethyl) methacrylamide hydrochloride, N-(3-aminopropyl)-methacrylamide hydrochloride, diallyldimethylammonium chloride, allylamine hydrochloride, vinyl imidazolium hydrochloride, vinyl pyridinium hydrochloride, and vinyl benzyl trimethyl ammonium chloride.

3. The porous membrane of claim 1 , wherein the monomer comprising the positive charge in the organic liquid comprises acrylamido propyl trimethylammonium chloride (APTAC).

4. The porous membrane of claim 1 , wherein the monomer comprising the positive charge in the organic liquid is a zwitterion.

5. A filtration device comprising: a first coated porous polymeric membrane comprising a first porous polymeric membrane having a polymer coating on surfaces thereof, wherein the polymer coating is cross-linked and not grafted to the first porous polymeric membrane surfaces and has a polymerized monomer with a positive charge in an organic liquid, and a second coated porous polymeric membrane comprising a second porous polymeric membrane having a polymer coating on surface thereof, wherein the polymer coating is cross-linked and not grafted to the second porous polymeric surfaces and has a polymerized monomer with a negative charge in the organic liquid,

wherein the coating is cross-linked with a cross-linking agent selected from the group consisting of 1,6-hexanediol diacrylate, tetraethylene glycol diacrylate, 1,1,1-trimethylolpropane triacrylate, and combinations thereof and

wherein the first porous polymeric membrane or the second porous polymeric membrane is a polyolefin membrane having a bubble point, measured from the pressure required to displace ethoxy-nonafluorobutane through pores of the porous polymeric membrane, in a range of 4-160 psi.

6. The filtration device of claim 5 , in which the monomer comprising the positive charge in the organic liquid is selected from a group consisting of 2-(dimethylamino)ethyl hydrochloride acrylate, [2-(acryloyloxy)ethyl]trimethylammonium chloride, 2-aminoethyl methacrylate hydrochloride, N-(3-aminopropyl) methacrylate hydrochloride, 2-(dimethylamino)ethyl methacrylate hydrochloride, [3-(methacryloylamino)propyl] trimethylammonium chloride solution, [2-(methacryloyloxy)ethyl]trimethylammonium chloride, acrylamidopropyl trimethylammonium chloride, 2-aminoethyl methacrylamide hydrochloride, N-(2-aminoethyl) methacrylamide hydrochloride, N-(3-aminopropyl)-methacrylamide hydrochloride, diallyldimethylammonium chloride, allylamine hydrochloride, vinyl imidazolium hydrochloride, vinyl pyridinium hydrochloride, and vinyl benzyl trimethyl ammonium chloride.

7. The filtration device of claim 5 , in which the monomer comprising the negative charge in the organic liquid is selected from a group consisting of 2-ethylacrylic acid, acrylic acid, 2-carboxyethyl acrylate, 3-sulfopropyl acrylate potassium salt, 2-propyl acrylic acid, 2-(trifluoromethyl)acrylic acid, methacrylic acid, 2-methyl-2-propene-1-sulfonic acid sodium salt, mono-2-(methacryloyloxy)ethyl maleate, and 3-sulfopropyl methacrylate potassium salt, 2-acrylamido-2-methyl-1-propanesulfonic acid, 3-methacrylamido phenyl boronic acid, vinyl sulfonic acid, and vinyl phosphonic acid.

8. The porous membrane of claim 1 , wherein said coating further comprises polymerized monomers with negative charges.

9. The porous membrane of claim 8 , wherein the monomer with a positive charge is selected from a group consisting of 2-(dimethylamino)ethyl hydrochloride acrylate, [2-(acryloyloxy)ethyl]trimethylammonium chloride, 2-aminoethyl methacrylate hydrochloride, N-(3-aminopropyl) methacrylate hydrochloride, 2-(dimethylamino)ethyl methacrylate hydrochloride, [3-(methacryloylamino)propyl]trimethylammonium chloride solution, [2-(methacryloyloxy)ethyl]trimethylammonium chloride, acrylamidopropyl trimethylammonium chloride, 2-aminoethyl methacrylamide hydrochloride, N-(2-aminoethyl) methacrylamide hydrochloride, N-(3-aminopropyl)-methacrylamide hydrochloride, diallyldimethylammonium chloride, allylamine hydrochloride, vinyl imidazolium hydrochloride, vinyl pyridinium hydrochloride, and vinyl benzyl trimethyl ammonium chloride.

10. The porous membrane of claim 8 , wherein the monomer with a negative charge is selected from a group consisting of 2-ethylacrylic acid, acrylic acid, 2-carboxyethyl acrylate, 3-sulfopropyl acrylate potassium salt, 2-propyl acrylic acid, 2-(trifluoromethyl)acrylic acid, methacrylic acid, 2-methyl-2-propene-1-sulfonic acid sodium salt, mono-2-(methacryloyloxy)ethyl maleate, and 3-sulfopropyl methacrylate potassium salt, 2-acrylamido-2-methyl-1-propanesulfonic acid, 3-methacrylamido phenyl boronic acid, vinyl sulfonic acid, and vinyl phosphonic acid.

11. The porous polymeric membrane of claim 1 , wherein the polyolefin membrane is an ultra-high molecular weight polyethylene membrane.

12. The porous membrane of claim 1 , wherein the monomer comprising the positive charge in the organic liquid is selected from a group consisting of 2-(dimethylamino)ethyl hydrochloride acrylate, [2-(acryloyloxy)ethyl]trimethylammonium chloride, 2-aminoethyl methacrylate hydrochloride, N-(3-aminopropyl) methacrylate hydrochloride, 2-(dimethylamino)ethyl methacrylate hydrochloride, [3-(methacryloylamino)propyl] trimethylammonium chloride solution, [2-(methacryloyloxy)ethyl]trimethylammonium chloride, acrylamidopropyl trimethylammonium chloride, diallyldimethylammonium chloride, allylamine hydrochloride, vinyl imidazolium hydrochloride, vinyl pyridinium hydrochloride, and vinyl benzyl trimethyl ammonium chloride.

13. The filtration device of claim 5 , wherein the monomer comprising the positive charge in the organic liquid is selected from a group consisting of 2-(dimethylamino)ethyl hydrochloride acrylate, [2-(acryloyloxy)ethyl]trimethylammonium chloride, 2-aminoethyl methacrylate hydrochloride, N-(3-aminopropyl) methacrylate hydrochloride, 2-(dimethylamino)ethyl methacrylate hydrochloride, [3-(methacryloylamino)propyl] trimethylammonium chloride solution, [2-(methacryloyloxy)ethyl]trimethylammonium chloride, acrylamidopropyl trimethylammonium chloride, diallyldimethylammonium chloride, allylamine hydrochloride, vinyl imidazolium hydrochloride, vinyl pyridinium hydrochloride, and vinyl benzyl trimethyl ammonium chloride.

Assignments (2)
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 6, 2019
From: JABER, JAD ALI; LY, SAKSATHA; HAMZIK, JAMES; KOHYAMA, TETSU
To: ENTEGRIS, INC.
Reel/Frame 048516/0140 →
Continuity (2)
Provisional Application 62342392 · May 27, 2016
Related Publication 20200206691A1 · Jul 2, 2020