Short-circuit performance for silicon carbide semiconductor device

1. A method of making a semiconductor device, comprising:

forming a source region providing at least a portion of a MOSFET source of a MOSFET and at least a portion of a JFET source of a JFET;

forming a JFET channel region in series with the source region and a MOSFET channel region of the MOSFET, and disposed between a first JFET gate and a second JFET gate; and

forming a JFET drain disposed at least partially between a gate insulator of a gate of the MOSFET and at least a portion of the JFET channel region, and in electrical contact with the first JFET gate and the second JFET gate.

2. The method of claim 1 , wherein forming the JFET channel region comprises:

forming the JFET channel region with a doping concentration N D , a width W JFET , and a length L configured to cause pinch-off of short-circuit current of the MOSFET during a short-circuit event of the MOSFET.

3. The method of claim 2 , wherein forming the JFET channel region comprises:

providing the JFET channel region with a channel dose N D ·W JFET for a value of L configured to cause the pinch-off to occur at a specified short-circuit current.

4. The method of claim 1 , wherein forming the JFET channel region comprises:

forming the first JFET gate and the second JFET gate electrically connected to the source region.

5. The method of claim 1 , wherein forming the JFET channel region comprises:

forming the first JFET gate adjacent to at least a portion of the JFET channel region.

6. The method of claim 1 , wherein forming the JFET drain comprises:

forming the JFET drain between the first JFET gate and the MOSFET channel region.

7. The method of claim 1 , wherein the MOSFET is a vertical power Silicon Carbide (SiC) MOSFET.

8. The method of claim 1 , comprising:

forming a source contact of the source region in electrical contact with the source region, the first JFET gate, and the second JFET gate.

9. A method of making a semiconductor device, comprising:

forming a well region within an epitaxial layer;

forming a JFET channel region within the well region and leaving at least a portion of the well region between the JFET channel region and the epitaxial layer;

forming a layer adjacent to the JFET channel region, the layer including a JFET source region, a first JFET gate, and a JFET drain region;

electrically connecting the JFET source region with the at least the portion of the well region, to provide the at least the portion of the well region as a second JFET gate, thereby providing a double-sided gate JFET; and

forming a MOSFET with a MOSFET channel region in series with the double-sided gate JFET.

10. The method of claim 9 , wherein forming the MOSFET comprises:

forming a source contact of the MOSFET that is electrically connected to the JFET source region, the first JFET gate, and the second JFET gate.

11. The method of claim 9 , wherein forming the MOSFET comprises:

forming a MOSFET gate of the MOSFET at least partially overlapping the JFET drain region, the second JFET gate, and the epitaxial layer.

12. The method of claim 9 , wherein the JFET channel region provides pinch-off of short-circuit current of the MOSFET during a short-circuit event of the MOSFET.

13. The method of claim 12 , wherein forming the JFET channel region comprises:

forming the JFET channel region with a doping concentration N D , a width W JFET and a length L selected to cause the pinch-off to occur at a specified short-circuit current.

14. The method of claim 13 , wherein a ratio of (N D ·W JFET )/L is selected to cause the pinch-off to occur at the specified short-circuit current.

15. The method of claim 9 , wherein forming the JFET channel region comprises doping the JFET channel region with a doping profile that varies in a direction extending between the first JFET gate and the second JFET gate.

16. The method of claim 9 , wherein forming the MOSFET comprises:

forming at least a portion of a MOSFET source of the MOSFET and at least a portion of the JFET source region electrically connected to a shared source contact.

17. A method of making a semiconductor device, the method comprising:

forming a well region of a first conductivity type in an epitaxial layer of a second conductivity type;

forming a JFET channel region within the well region, the JFET channel region having the second conductivity type;

forming a first JFET gate on the JFET channel region, the first JFET gate having the first conductivity type;

forming a JFET source region and a JFET drain region, the JFET source region and the JFET drain region having the second conductivity type, the first JFET gate being disposed between the JFET source region and the JFET drain region;

forming an electrical contact between the JFET source region and the well region, to provide at least a portion of the well region as a second JFET gate electrically connected to the JFET source region;

forming a MOSFET source contact of a MOSFET that is electrically connected to the JFET source region and the first JFET gate, and to the second JFET gate by way of the electrical contact; and

forming a MOSFET gate of the MOSFET at least partially overlapping the JFET drain region, the well region, and the epitaxial layer.

18. The method of claim 17 , wherein forming the first JFET gate comprising forming the first JFET gate disposed between the JFET channel region and a surface of the semiconductor device.

19. The method of claim 17 , wherein forming the JFET channel region comprises doping the JFET channel region with a doping profile of the second conductivity type that varies in a vertical direction.

20. The method of claim 17 , comprising:

forming the JFET channel region with a channel width W JFET , a channel length L, and a doping profile selected to provide pinch-off of the JFET channel region at a specified short-circuit current of the MOSFET.