IP Library Granted Patent US 11,385,408
Granted Patent B2
US 11,385,408 · App. 16/849,355 · Granted Jul 12, 2022

Stacked-waveguide polarizers with conductive oxide strips

Inventors: Yusheng Bian (Ballston Lake, NY); Won Suk Lee (Malta, NY)
Assignee: GlobalFoundries U.S. Inc.
G02B6/126G02B6/1228G02B2006/12061
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,385,408
App. No.
16/849,355
Granted
Jul 12, 2022
Kind
B2
Abstract

Structures for a polarizer and methods of forming a structure for a polarizer. A polarizer includes a first waveguide core and a layer that is positioned adjacent to a side surface of the first waveguide core. The layer is composed of a first material having a permittivity with an imaginary part that ranges from 0 to about 15. A second waveguide core is positioned over the first waveguide core. The second waveguide core is composed of a second material that is different in composition from the first material.

Claims (28)

1. A structure comprising:

a polarizer including a first waveguide core and a first layer, the first waveguide core having a first side surface, the first layer positioned adjacent to the first side surface of the first waveguide core, and the first layer comprising a first material having a permittivity with an imaginary part that ranges from 0 to about 15; and

a second waveguide core positioned over the polarizer, the second waveguide core including a first end, a second end opposite to the first end, a first taper that terminates the second waveguide core at the first end, and a second taper that terminates the second waveguide core at the second end, and the second waveguide core comprising a second material that is different in composition from the first material.

2. The structure of claim 1 further comprising:

a dielectric layer positioned between the polarizer and the second waveguide core.

3. The structure of claim 1 wherein the first waveguide core has a first width, and further comprising:

a third waveguide core coupled to the first waveguide core,

wherein the third waveguide core has a second width, the first width is greater than the second width, and the second waveguide core has a third width that is greater than the second width.

4. The structure of claim 1 wherein the second waveguide core includes a section connected to the first taper, and the first taper and the section of the second waveguide core are positioned directly over the polarizer.

5. The structure of claim 4 wherein the polarizer includes a taper coupled to the first waveguide core, the first taper of the second waveguide core is positioned directly over the taper of the polarizer, and the section of the second waveguide core is positioned directly over the first waveguide core of the polarizer.

6. The structure of claim 4 wherein the second taper of the second waveguide core is directly connected to the first taper by the section, and the second taper of the second waveguide core is positioned directly over the polarizer.

7. The structure of claim 6 wherein the polarizer includes a first taper and a second taper that is directly connected to the first taper by the first waveguide core.

8. The structure of claim 7 wherein the first taper of the second waveguide core is positioned directly over the first taper of the polarizer, the second taper of the second waveguide core is positioned directly over the second taper of the polarizer, and the section of the second waveguide core is positioned directly over the first waveguide core of the polarizer.

9. The structure of claim 8 wherein the first waveguide core has a first length, the section of the second waveguide core has a second length, and the first length is approximately equal to the second length.

10. The structure of claim 9 wherein the section of the second waveguide core is wider than the first waveguide core.

11. The structure of claim 1 wherein the polarizer includes a second layer positioned between the first layer and the first side surface, and the second layer is comprised of silicon dioxide.

12. The structure of claim 1 wherein the first material is a metal vanadate, the second waveguide core comprises single-crystal silicon, and the second material is silicon nitride or polysilicon.

13. The structure of claim 1 wherein the first material is calcium vanadate or strontium vanadate, the second waveguide core comprises single-crystal silicon, and the second material is silicon nitride or polysilicon.

14. The structure of claim 1 wherein the polarizer includes a second layer comprised of the first material, the first waveguide core has a second side surface, and the second layer is positioned adjacent to the second side surface of the first waveguide core.

15. The structure of claim 14 wherein the polarizer includes a third layer positioned between the first layer and the first side surface, a fourth layer positioned between the second layer and the second side surface, and the third layer and the fourth layer are comprised of silicon dioxide.

16. The structure of claim 1 wherein the first layer is in direct contact with the first side surface of the first waveguide core.

17. The structure of claim 1 wherein the polarizer includes a second layer and a third layer positioned between the second layer and the first layer, and the third layer is comprised of silicon dioxide, and the second layer is comprised of the first material.

18. A method comprising:

forming a polarizer including a first waveguide core and a layer that is positioned adjacent to a side surface of the first waveguide core; and

forming a second waveguide core positioned over the polarizer,

wherein the second waveguide core includes a first end, a second end opposite to the first end, a first taper that terminates the second waveguide core at the first end, and a second taper that terminates the second waveguide core at the second end, the layer comprises a first material having a permittivity with an imaginary part that ranges from 0 to about 15, and the second waveguide core comprises a second material that is different in composition from the first material.

19. The method of claim 18 wherein the first material is a metal vanadate.

20. The method of claim 18 wherein a dielectric layer is formed between the polarizer and the second waveguide core.

Assignments (3)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 15, 2020
From: BIAN, YUSHENG; LEE, WON SUK
To: GLOBALFOUNDRIES INC.
Reel/Frame 052405/0868 →
Continuity (1)
Related Publication 20210325603A1 · Oct 21, 2021
Cited By (1)
US 12,613,381