Photodiode and/or pin diode structures with one or more vertical surfaces
The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: at least one vertical pillar feature within a trench; a photosensitive semiconductor material extending laterally from sidewalls of the at least one vertical pillar feature; and a contact electrically connecting to the photosensitive semiconductor material.
1. A structure, comprising:
at least one vertical pillar feature within a trench;
a photosensitive semiconductor material extending laterally from sidewalls of the at least one vertical pillar feature; and
a contact electrically connecting to the photosensitive semiconductor material.
2. The structure of claim 1 , further comprising a blocking material on a bottom surface of the trench and a top of the at least one vertical pillar feature, wherein the at least one vertical pillar is comprised of substrate material and the blocking material is reflective insulator material.
3. The structure of claim 2 , wherein the substrate material is Si material and the photosensitive material is undoped Ge material.
4. The structure of claim 1 , wherein the at least one vertical pillar feature is embedded within the photosensitive semiconductor material.
5. The structure of claim 4 , wherein the at least one vertical pillar feature is multiple vertical pillar features.
6. The structure of claim 5 , wherein the photosensitive semiconductor material spans between the multiple vertical pillar features.
7. The structure of claim 5 , wherein the photosensitive semiconductor material separately embeds each of the multiple vertical pillar features without contacting one another.
8. The structure of claim 1 , wherein the at least one vertical pillar feature is n-doped material connecting to an n-well implant under the trench.
9. The structure of claim 1 , further comprising an active or passive device outside of the trench.
10. The structure of claim 1 , further comprising a p+ poly material surrounding the photosensitive semiconductor material and the contact is connecting to the p+ poly material.
11. The structure of claim 1 , wherein the photosensitive semiconductor material is domed shape above a surface of the trench.
12. A structure, comprising:
a trench within substrate material;
a deep n-well implant region under the trench;
shallow trench isolation regions isolating the trench;
at least one vertical pillar feature extending upwardly within the trench;
an insulator material at a lower portion of the trench;
a photosensitive material above the insulator material and embedding the at least one vertical pillar feature; and
semiconductor material lining the photosensitive material.
13. The structure of claim 12 , wherein the at least one vertical pillar is Si material, the photosensitive material is undoped Ge material, the insulator material is reflective material, and the semiconductor material is p+ polysilicon.
14. The structure of claim 13 , wherein the at least one vertical pillar is n-doped material connecting to the deep n-well implant region under the trench.
15. The structure of claim 14 , wherein the at least one vertical pillar feature is multiple vertical pillar features.
16. The structure of claim 15 , wherein the photosensitive semiconductor material spans between the multiple vertical pillar features.
17. The structure of claim 15 , wherein the photosensitive semiconductor material separately embeds each of the multiple vertical pillar features without contacting one another.
18. The structure of claim 12 , further comprising an active or passive device outside of the trench.
19. The structure of claim 12 , wherein the photosensitive semiconductor material is domed shape.
20. A method comprising:
forming at least one vertical pillar feature within a trench;
forming a photosensitive semiconductor material extending laterally from sidewalls of the at least one vertical pillar feature; and
forming a contact electrically connecting to the photosensitive semiconductor material.