Integrated circuit structure with optical absorber layer over optical grating coupler
Embodiments of the disclosure provide an integrated circuit (IC) structure, including an optical medium for light signals; and an optical grating coupler coupled to the optical medium. The optical grating coupler is configured to reorient light from the optical medium. A cladding material is over the optical grating coupler. An absorber layer is over the cladding material, and vertically above the optical grating coupler.
1. An integrated circuit (IC) structure, comprising:
an optical medium for light signals;
an optical grating coupler coupled to the optical medium, wherein the optical grating coupler is configured to reorient light from the optical medium;
a cladding material over the optical grating coupler; and
an absorber layer over the cladding material, and vertically above the optical grating coupler.
2. The IC structure of claim 1 , wherein the optical medium comprises an optical tap between the optical medium and a silicon waveguide (SWG) structure.
3. The IC structure of claim 1 , wherein the optical medium laterally terminates within the cladding material beneath the optical grating coupler.
4. The IC structure of claim 1 , wherein the absorber layer includes a material having a refractive index of at least approximately 1.5.
5. The IC structure of claim 4 , wherein the material includes an epoxy.
6. The IC structure of claim 1 , wherein the cladding material includes a dielectric material on a substrate, wherein a portion of the dielectric material is vertically between the substrate and the optical medium.
7. The IC structure of claim 1 , wherein the optical medium includes silicon, and wherein the optical grating coupler includes polycrystalline silicon.
8. The IC structure of claim 1 , wherein the optical medium is coupled to an intermediate optical element having a u-shaped bend between two device components.
9. An integrated circuit (IC) structure, comprising:
an optical medium for light signals;
an optical grating coupler coupled to the optical medium, wherein the optical grating coupler is configured to reorient light from the optical medium;
a cladding material over the optical grating coupler; and
an absorber layer above the optical grating coupler and the cladding material, wherein at least a portion of the cladding material is vertically above the optical grating coupler.
10. The IC structure of claim 9 , wherein a thickness of the portion of the cladding material between the optical grating coupler and the absorber layer is at least approximately 1.0 micrometers.
11. The IC structure of claim 9 , wherein an upper surface of the absorber layer is substantially coplanar with an upper surface of a back end of line stack above the optical grating coupler.
12. The IC structure of claim 9 , wherein the optical medium comprises an optical tap between the optical medium and a silicon waveguide (SWG) structure.
13. The IC structure of claim 12 , wherein the optical medium laterally terminates within the cladding material beneath the optical grating coupler.
14. The IC structure of claim 9 , wherein the absorber layer includes a material having a refractive index of at least approximately 1.5.
15. The IC structure of claim 9 , further comprising the absorber layer and a metal wire within an insulator layer, wherein the absorber layer is above the optical grating coupler.
16. The IC structure of claim 9 , wherein the optical medium is coupled to an intermediate optical element having a u-shaped bend between two device components.
17. An integrated circuit (IC) structure, comprising:
a substrate;
a cladding material over the substrate, wherein the cladding material includes a dielectric material;
an optical medium configured to carry light signals, and embedded within the cladding material between an upper surface and a lower surface of the cladding material;
an optical grating coupler coupled to the optical medium, wherein the optical grating coupler is configured to reorient light from the optical medium through the cladding material;
an absorber layer on the cladding material and above the optical grating coupler, wherein least a portion of the cladding material is vertically between the optical grating coupler and the absorber layer.
18. The IC structure of claim 17 , wherein an upper surface of the absorber layer is substantially coplanar with an upper surface of a back end of line stack above the cladding material.
19. The IC structure of claim 17 , wherein the absorber layer includes an epoxy having a refractive index of at least approximately 1.5.
20. The IC structure of claim 17 , wherein the optical medium includes an optical tap coupled to an intermediate optical element having a u-shaped bend between two device components.