Semiconductor device and method of compartment shielding using bond wires
A semiconductor device has a substrate and a plurality of bond wires is disposed in a pattern across on the substrate. The pattern of bond wires can be a plurality of rows of bond wires. A plurality of electrical components is disposed over the substrate as an SIP module. An encapsulant is deposited over the substrate, electrical components, and bond wire. An opening is formed in the encapsulant extending to the bond wire. The opening can be a trench extending across the bond wires disposed on the substrate, or a plurality of openings individually exposing each of a plurality of bond wires. A conductive material is disposed in the opening. A shielding layer is formed over the encapsulant and in contact with the conductive material. The shielding layer, conductive material, and bond wires reduce the effects of EMI, RFI, and other inter-device interference.
1. A method of making a semiconductor device, comprising:
providing a substrate;
disposing a bond wire including a bulbous portion on the substrate with a stem extending from the bulbous portion;
disposing an electrical component over the substrate;
depositing an encapsulant over the substrate, electrical component, and bond wire;
forming an opening in the encapsulant extending below a surface of the encapsulant to a distal end of the stem of the bond wire; and
disposing a conductive material in the opening.
2. The method of claim 1 , further including forming a shielding layer over the encapsulant and in contact with the conductive material.
3. The method of claim 1 , further including disposing a plurality of bond wires arranged in a pattern across the substrate.
4. The method of claim 3 , wherein the pattern includes a plurality of rows of bond wires.
5. The method of claim 1 , wherein the opening includes a trench extending across a plurality of bond wires disposed on the substrate.
6. The method of claim 1 , further including forming a plurality of openings individually exposing each of a plurality of bond wires.
7. A method of making a semiconductor device, comprising:
providing a substrate;
disposing a bond wire including a bulbous portion on the substrate with a stem extending from the bulbous portion;
depositing an encapsulant over the substrate and bond wire;
forming an opening in the encapsulant extending to the stem of the bond wire; and
disposing a conductive material in the opening.
8. The method of claim 7 , further including:
disposing an electrical component over the substrate; and
forming a shielding layer over the encapsulant and in contact with the conductive material.
9. The method of claim 7 , further including disposing a plurality of bond wires arranged in a pattern across the substrate.
10. The method of claim 9 , wherein the pattern includes a plurality of rows of bond wires.
11. The method of claim 7 , wherein the opening includes a trench extending across a plurality of bond wires disposed on the substrate.
12. The method of claim 7 , wherein the opening includes a beveled side surface.
13. The method of claim 7 , further including forming a plurality of openings individually exposing each of a plurality of bond wires.
14. A semiconductor device, comprising:
a substrate;
a bond wire including a bulbous portion disposed on the substrate and stem extending from the bulbous portion;
an electrical component disposed over the substrate;
an encapsulant deposited over the substrate, electrical component, and bond wire with an opening in the encapsulant extending below a surface of the encapsulant to a distal end of the stem of the bond wire; and
a conductive material deposited in the opening.
15. The semiconductor device of claim 14 , further including a shielding layer formed over the encapsulant and in contact with the conductive material.
16. The semiconductor device of claim 14 , further including a plurality of bond wires arranged in a pattern across the substrate.
17. The semiconductor device of claim 14 , wherein the opening includes a trench extending across a plurality of bond wires disposed on the substrate.
18. The semiconductor device of claim 14 , further including a plurality of openings individually exposing each of a plurality of bond wires.
19. A semiconductor device, comprising:
a substrate;
a bond wire including a bulbous portion disposed on the substrate and stem extending from the bulbous portion;
an encapsulant deposited over the substrate and bond wire with an opening in the encapsulant extending to the stem of the bond wire; and
a conductive material disposed in the opening.
20. The semiconductor device of claim 19 , further including:
an electrical component disposed over the substrate; and
a shielding layer formed over the encapsulant and in contact with the conductive material.
21. The semiconductor device of claim 19 , further including a plurality of bond wires arranged in a pattern across the substrate.
22. The semiconductor device of claim 19 , wherein the opening includes a trench extending across a plurality of bond wires disposed on the substrate.
23. The semiconductor device of claim 19 , further including a plurality of openings individually exposing each of a plurality of bond wires.