IP Library Granted Patent US 12,040,295
Granted Patent B2
US 12,040,295 · App. 17/320,495 · Granted Jul 16, 2024

Semiconductor device with backmetal and related methods

Inventors: Michael J. Seddon (Gilbert, AZ); Takashi Noma (Ota, JP); Kazuo Okada (Ota, JP); Hideaki Yoshimi (Oura-gun, JP); Naoyuki Yomoda (Sakata, JP); Yusheng Lin (Phoenix, AZ)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L24/10H01L21/78H01L23/49811H01L24/95
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Quick Facts
Patent No.
US 12,040,295
App. No.
17/320,495
Granted
Jul 16, 2024
Kind
B2
Abstract

Implementations of semiconductor devices may include a die having a first side and a second side, a contact pad coupled to the first side of the die, and a metal layer coupled to the second side of the die. A thickness of the die may be no more than four times a thickness of the metal layer.

Claims (48)

1. A semiconductor device comprising:

a die comprising a first side and a second side;

a contact pad coupled to the first side of the die;

a metal layer coupled to the second side of the die; and

a mold compound coupled directly to the metal layer;

wherein an outer sidewall of the mold compound comprises a step facing away from the metal layer;

wherein a thickness of the die is less than 30 micrometers;

wherein the contact pad is exposed through a passivation layer coupled over the die;

wherein the die is a singulated die;

wherein the mold compound covers and contacts an outermost sidewall of the metal layer;

wherein an outer sidewall of the die is coplanar with an outermost sidewall of the mold compound; and

wherein a perimeter of an entirety of the metal layer is less than and lies within a perimeter of the die.

2. The device of claim 1 , wherein the thickness of the die is substantially the same as the thickness of the metal layer.

3. The device of claim 1 , wherein five sides of the metal layer are covered by the mold compound and wherein an entire surface of the metal layer opposite a surface facing the die lies in the same plane.

4. The device of claim 1 , wherein the mold compound is directly coupled over the metal layer.

5. The semiconductor device of claim 1 , wherein a surface of the contact pad facing away from the die is coplanar with a surface of a passivation layer facing away from the die.

6. A semiconductor device comprising:

a die comprising a first side and a second side;

a contact pad coupled to the first side of the die;

a metal layer coupled to the second side of the die; and

a mold compound directly coupled to and over an entire first surface of the metal layer opposite a second surface of the metal layer facing the second side of the die;

wherein an outer sidewall of the mold compound comprises a step;

wherein the die is singulated from a wafer;

wherein the mold compound covers and contacts an outermost sidewall of the metal layer;

wherein an outer sidewall of the die is coplanar with an outermost sidewall of the mold compound; and

wherein a perimeter of an entirety of the metal layer is less than and lies within a perimeter of the die.

7. The device of claim 6 , wherein a thickness of the die is substantially the same as a thickness of the metal layer.

8. The device of claim 6 , wherein a thickness of the die is no more than four times a thickness of the metal layer.

9. The device of claim 6 , wherein the step surrounds an outermost sidewall of the metal layer.

10. The semiconductor wafer of claim 6 , wherein a surface of the contact pad facing away from the die is coplanar with a surface of a passivation layer facing away from the die.

11. A semiconductor wafer comprising:

a wafer comprising a first side and a second side, the wafer comprising a plurality of die;

a plurality of contact pads coupled to the first side of the wafer;

a metal layer coupled within a recess comprised in the second side of the wafer; and

a mold compound coupled directly to and over the metal layer;

wherein a portion of the wafer is coplanar with a plane formed by a portion of the mold compound facing away from the metal layer;

wherein the metal layer is patterned by a plurality of openings extending through the metal layer;

wherein the mold compound fills the plurality of openings; and

wherein the mold compound comprises a plurality of recesses over each opening of the plurality of openings.

12. The semiconductor wafer of claim 11 , wherein a thickness of the wafer is less than 30 micrometers.

13. The semiconductor wafer of claim 11 , wherein the mold compound covers an entire first surface of the metal layer opposite a second surface of the metal layer facing the second side of the wafer.

14. The semiconductor wafer of claim 11 , further comprising a plurality of bumps coupled over the metal layer.

15. The semiconductor wafer of claim 11 , further comprising a conductive layer coupled between the plurality of contact pads and the wafer.

16. The semiconductor wafer of claim 11 , further comprising a second metal layer coupled over the metal layer.

17. The semiconductor wafer of claim 11 , wherein a thickness of the metal layer is substantially three times a thickness of the wafer.

18. The semiconductor wafer of claim 11 , wherein the plurality of contact pads are exposed through a passivation layer coupled over the wafer.

19. The semiconductor wafer of claim 18 , wherein a surface of the contact pads facing away from the wafer is coplanar with a surface of the passivation layer facing away from the wafer.

20. The semiconductor wafer of claim 11 , further comprising a seed layer directly coupled to the wafer within the recess.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 057054, FRAME 0706 Recorded Jun 23, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064083/0001 →
SECURITY INTEREST Recorded Aug 2, 2021
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 057054/0706 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 14, 2021
From: SEDDON, MICHAEL J.; LIN, YUSHENG; NOMA, TAKASHI; OKADA, KAZUO; YOSHIMI, HIDEAKI; YOMODA, NAOYUKI
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 056242/0082 →