IP Library › Granted Patent US 11,675,277
Granted Patent Utility
US 11,675,277 · Confirmation No. 5101

SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY MEASUREMENT

Applicant: KLA Corporation
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Quick Facts
Patent No.
US 11,675,277
App. No.
17/560,905
Filed
2021-12-23
Granted
2023-06-13
Pub. No.
US20220334502A1
Art Unit
2877
PTA
-149 days