IP Library › Granted Patent US 11,231,654
Granted Patent Utility
US 11,231,654 · Confirmation No. 8234

SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY MEASUREMENT

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2022-02-28 C.AD.PAIR Change of Address via Patent Application Information Retrieval (PAIR) 1 View
2022-01-28 MF.AD.PAIR Maintenance Fee Address Change for PAIR 1 View
2022-01-19 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2022-01-19 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2022-01-12 PA.. Power of Attorney 2 View
2022-01-12 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2022-01-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2022-01-05 ISSUE.NTF Issue Notification 1 View
2021-12-22 OATH Oath or Declaration filed 5 View
2021-12-14 MFEE.C.AD Maintenance Fee Address Change 1 View
2021-12-14 WFEE Fee Worksheet (SB06) 2 View
2021-12-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-12-14 IFEE Issue Fee Payment (PTO-85B) 1 View
2021-11-17 NOA Notice of Allowance and Fees Due (PTOL-85) 9 View
2021-11-17 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2021-11-17 892 List of references cited by examiner 1 View
2021-11-17 SRFW Search information including classification, databases and other search related notes 1 View
2021-11-17 FWCLM Index of Claims 1 View
2021-11-17 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 3 View
2021-11-17 BIB Bibliographic Data Sheet 2 View
2021-11-17 SRNT Examiner's search strategy and results 7 View
2021-11-17 1449 List of References cited by applicant and considered by examiner 4 View
2021-10-20 DISQ Terminal Disclaimer review decision 1 View
2021-10-20 DIST Terminal Disclaimer Filed 2 View
2021-10-20 WFEE Fee Worksheet (SB06) 2 View
2021-10-20 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-10-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2021-10-20 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2021-10-20 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2021-10-20 CLM Claims 5 View
2021-09-21 APP.FILE.REC Filing Receipt 4 View
2021-09-01 ADS Application Data Sheet 10 View
2021-09-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-08-04 CTNF Non-Final Rejection 14 View
2021-08-04 892 List of references cited by examiner 1 View
2021-08-04 SRFW Search information including classification, databases and other search related notes 1 View
2021-08-04 FWCLM Index of Claims 1 View
2021-08-04 1449 List of References cited by applicant and considered by examiner 6 View
2021-08-04 1449 List of References cited by applicant and considered by examiner 4 View
2021-08-04 SRNT Examiner's search strategy and results 6 View
2021-04-20 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2021-04-20 FOR Foreign Reference 16 View
2021-04-20 FOR Foreign Reference 24 View
2021-04-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-02-03 APP.FILE.REC Filing Receipt 4 View
2021-02-01 CFILE Request for Corrected Filing Receipt 5 View
2021-02-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-01-29 APP.FILE.REC Filing Receipt 4 View
2021-01-29 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2021-01-25 PA.. Power of Attorney 1 View
2021-01-25 R3.73 Assignee showing of ownership per 37 CFR 3.73 3 View
2021-01-25 R46C.REQ Request under 37CFR1.46(c) to correct, update, change applicant 2 View
2021-01-25 ADS Application Data Sheet 10 View
2021-01-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2020-07-30 NTC.PUB Notice of Publication 1 View
2020-04-23 APP.FILE.REC Filing Receipt 4 View
2020-04-23 WFEE Fee Worksheet (SB06) 1 View
2020-04-14 OATH Oath or Declaration filed 9 View
2020-04-14 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2020-04-14 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2020-04-14 WFEE Fee Worksheet (SB06) 2 View
2020-04-14 N417 Electronic Filing System Acknowledgment Receipt 3 View
2020-04-14 SPEC Specification 27 View
2020-04-14 CLM Claims 5 View
2020-04-14 ABST Abstract 1 View
2020-04-14 DRW.NONBW Drawings-other than black and white line drawings 6 View
2020-04-14 OATH Oath or Declaration filed 7 View
2020-04-14 ADS Application Data Sheet 10 View
2020-04-14 PA.. Power of Attorney 2 View
2020-04-14 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
Patent No.
US 11,231,654
App. No.
16/847,721
Filed
2020-04-14
Granted
2022-01-25
Pub. No.
US20200241429A1
Art Unit
2877
PTA
0 days