Patent Assignment
Reel/Frame 058458/0403
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded: 2021-12-22
Received: 2021-12-22
Pages: 5
Assignor
GLOBALFOUNDRIES U.S. INC.
Executed: 2021-12-16
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, LEGAL DEPARTMENT, MILPITAS, CA, 95035, UNITED STATES
Covered Applications
(11)
SILICA SUBSTRATES FOR SLOW RELEASE ASPHALTENE CONTROL CHEMICAL SQUEEZE TREATMENTS
App. No. 17/557,611
→
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY MEASUREMENT
App. No. 16/847,721
→
OVERLAY OPTIMIZATION
App. No. 16/679,826
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STRUCTURE AND METHOD TO IMPROVE OVERLAY PERFORMANCE IN SEMICONDUCTOR DEVICES
App. No. 16/654,354
→
ASYMMETRIC OVERLAY MARK FOR OVERLAY MEASUREMENT
App. No. 15/985,838
→
STRUCTURE AND METHOD TO IMPROVE OVERLAY PERFORMANCE IN SEMICONDUCTOR DEVICES
App. No. 15/904,853
→
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY MEASUREMENT
App. No. 15/869,150
→
OVERLAY STRUCTURES
App. No. 15/860,775
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OVERLAY MARK STRUCTURES
App. No. 15/681,007
→
METROLOGY MARKS FOR UNIDIRECTIONAL GRATING SUPERPOSITION PATTERNING PROCESSES
App. No. 13/968,348
→
METHODS OF FORMING ALIGNMENT MARKS AND OVERLAY MARKS ON INTEGRATED CIRCUIT PRODUCTS EMPLOYING FINFET DEVICES AND THE RESULTING ALIGNMENT/OVERLAY MARK
App. No. 13/834,608
→