IP Library › Granted Patent US 9,275,890
Granted Patent Utility
US 9,275,890 · Confirmation No. 8024

METHODS OF FORMING ALIGNMENT MARKS AND OVERLAY MARKS ON INTEGRATED CIRCUIT PRODUCTS EMPLOYING FINFET DEVICES AND THE RESULTING ALIGNMENT/OVERLAY MARK

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2015-11-18 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2015-11-18 BIB Bibliographic Data Sheet 1 View
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2015-11-18 SRNT Examiner's search strategy and results 2 View
2015-11-18 A.NE.AFCP.D After Final Consideration Program Decision 1 View
2015-11-18 FWCLM Index of Claims 1 View
2015-10-29 A.NE Response After Final Action 1 View
2015-10-29 CLM Claims 5 View
2015-10-29 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2015-10-29 A.NE.AFCP After Final Consideration Program Request 1 View
2015-10-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-10-29 WFEE Fee Worksheet (SB06) 1 View
2015-10-06 CTFR Final Rejection 10 View
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2015-06-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2015-06-30 CLM Claims 5 View
2015-06-30 REM Applicant Arguments/Remarks Made in an Amendment 3 View
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2015-06-10 CTNF Non-Final Rejection 9 View
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2015-06-10 SRNT Examiner's search strategy and results 3 View
2015-06-10 FWCLM Index of Claims 1 View
2015-05-04 A.NE Response After Final Action 1 View
2015-05-04 CLM Claims 5 View
2015-05-04 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2015-05-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-05-04 WFEE Fee Worksheet (SB06) 1 View
2015-03-04 CTFR Final Rejection 8 View
2015-03-04 892 List of references cited by examiner 1 View
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2014-09-18 NTC.PUB Notice of Publication 1 View
2014-09-02 CTNF Non-Final Rejection 7 View
2014-09-02 892 List of references cited by examiner 1 View
2014-09-02 SRFW Search information including classification, databases and other search related notes 1 View
2014-09-02 SRNT Examiner's search strategy and results 8 View
2014-09-02 FWCLM Index of Claims 1 View
2014-04-30 ELC. Response to Election / Restriction Filed 2 View
2014-04-30 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-04-09 CTRS Requirement for Restriction/Election 7 View
2014-04-09 FWCLM Index of Claims 1 View
2013-06-27 TRAN.LET Transmittal Letter 1 View
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2013-06-27 OATH Oath or Declaration filed 5 View
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2013-03-15 WFEE Fee Worksheet (SB06) 2 View
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2013-03-15 ADS Application Data Sheet 7 View
2013-03-15 SPEC Specification 19 View
2013-03-15 CLM Claims 5 View
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Quick Facts
Patent No.
US 9,275,890
App. No.
13/834,608
Filed
2013-03-15
Granted
2016-03-01
Pub. No.
US20140264631A1
Art Unit
2822
PTA
0 days