Patent Application
Utility
App. No. 19/374,664
· Confirmation No. 3109
METHOD FOR ADJUSTING THE TELECENTRICITY IN A PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY
Inventors:
Jan Biller, Dirk Petrus Josephus Van Leuken, Ijen Laurens Van Mil, Ruirt Willem Bosma, Johannes Jacobus Matheus Baselmans, Stig Bieling
Applicant:
Carl Zeiss SMT GmbH
Docketed New Case - Ready for Examination
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| 2026-04-03 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2026-02-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2026-02-21 | OATH |
Oath or Declaration filed | 6 | View | |
| 2025-12-24 | FOR |
Foreign Reference | 45 | View | |
| 2025-12-24 | FOR |
Foreign Reference | 34 | View | |
| 2025-12-24 | FOR |
Foreign Reference | 55 | View | |
| 2025-12-24 | FOR |
Foreign Reference | 21 | View | |
| 2025-12-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2025-12-24 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2025-12-24 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2025-11-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2025-11-19 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 1 | View | |
| 2025-11-19 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2025-11-19 | WELCOME.LET |
Welcome Letter from USPTO Director and Deputy Director | 1 | View | |
| 2025-11-18 | PD.FILED.E |
Priority Documents electronically retrieved by USPTO from a participating IP Office | 66 | View | |
| 2025-11-18 | PD.FILED.E |
Priority Documents electronically retrieved by USPTO from a participating IP Office | 57 | View | |
| 2025-10-30 | APP.TEXT |
Application body structured text document | — | View | |
| 2025-10-30 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2025-10-30 | APP.TEXT |
Application body structured text document | — | View | |
| 2025-10-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2025-10-30 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2025-10-30 | CLM |
Claims | 5 | View | |
| 2025-10-30 | A.PE |
Preliminary Amendment | 1 | View | |
| 2025-10-30 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2025-10-30 | ADS |
Application Data Sheet | 10 | View | |
| 2025-10-30 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-10-30 | SPEC |
Specification | 50 | View | |
| 2025-10-30 | CLM |
Claims | 5 | View | |
| 2025-10-30 | ABST |
Abstract | 1 | View | |
| 2025-10-30 | PA.. |
Power of Attorney | 2 | View | |
| 2025-10-30 | TRNA |
Transmittal of New Application | 3 | View | |
| 2025-10-30 | SCORE |
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Inventors
Jan Biller
Veldhoven, NETHERLANDS
Dirk Petrus Josephus Van Leuken
Veldhoven, NETHERLANDS
Ijen Laurens Van Mil
Veldhoven, NETHERLANDS
Ruirt Willem Bosma
Veldhoven, NETHERLANDS
Johannes Jacobus Matheus Baselmans
Veldhoven, NETHERLANDS
Stig Bieling
Oberkochen, GERMANY
Attorneys & Agents of Record
Classification
USPC
355/67
G03F7/70191
G03F7/70266
G03F7/70141
Prosecution
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
- Customer No.
- 26161
- Docket No.
- 23080-0073001
- Confirmation No.
- 3109
Foreign Priority
10 2023 204 114.6
·
2023-05-04
·
GERMANY
10 2024 200 820.6
·
2024-01-30
·
GERMANY
Publication
- Pub. No.
- US20260056474A1
- Pub. Date
- 2026-02-26
from
BILLER, JAN,
BOSMA, RUIRT WILLEM,
VAN LEUKEN, DIRK PETRUS JOSEPHUS,
BASELMANS, JOHANNES JACOBUS MATHEUS,
VAN MIL, IJEN LAURENS
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2026-03-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2026-03-01
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Quick Facts
- App. No.
- 19/374,664
- Filed
- 2025-10-30
- Pub. No.
- US20260056474A1
- Examiner
- CENTRAL, DOCKET
- Art Unit
- OPAP
External Links