Patent Application
Provisional
Small
App. No. 60/838,566
· Confirmation No. 7143
System and method for processing a substrate using repetitive gas burst
Inventor:
Cole S. Franklin
Provisional Application Expired
Inventors
Cole S. Franklin
San Clemente, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 40440
- Docket No.
- AKR002-005P1
- Confirmation No.
- 7143
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Quick Facts
- App. No.
- 60/838,566
- Filed
- 2006-08-18
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