Patent Application
Provisional
App. No. 61/033,969
· Confirmation No. 4122
PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE A PASSIVATION STEP BEFORE AND/OR DURING PLASMA PROCESSING
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-03-20 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-03-05 | ADS |
Application Data Sheet | 5 | View | |
| 2008-03-05 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-03-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2008-03-05 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2008-03-05 | SPEC |
Specification | 11 | View | |
| 2008-03-05 | CLM |
Claims | 1 | View | |
| 2008-03-05 | ABST |
Abstract | 1 | View |
Inventors
Keping Han
Beverly, MA
Shijian Luo
South Hamilton, MA
Jianan Hou
Lexington, MA
Carlo Waldfried
Falls Church, VA
Ivan Berry
Ellicott City, MD
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23413
- Docket No.
- 08-CCS-008 (ATI-0041)
- Confirmation No.
- 4122
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Quick Facts
- App. No.
- 61/033,969
- Filed
- 2008-03-05
External Links