Patent Application
Provisional
App. No. 61/185,109
· Confirmation No. 3527
SYSTEM AND METHOD FOR ION IMPLANTATION WITH IMPROVED PRODUCTIVITY AND UNIFORMITY
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2009-06-29 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2009-06-08 | ADS |
Application Data Sheet | 4 | View | |
| 2009-06-08 | TR.PROV |
Provisional Cover Sheet (SB16) | 2 | View | |
| 2009-06-08 | SPEC |
Specification | 25 | View | |
| 2009-06-08 | CLM |
Claims | 7 | View | |
| 2009-06-08 | ABST |
Abstract | 1 | View | |
| 2009-06-08 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2009-06-08 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2009-06-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP271P
- Confirmation No.
- 3527
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Quick Facts
- App. No.
- 61/185,109
- Filed
- 2009-06-08
External Links