IP Library › Patent Application 61349552
Patent Application Provisional
App. No. 61/349,552 · Confirmation No. 1243

Matched Coefficient of Thermal Expansion for an Electrostatic Chuck

Provisional Application Expired
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 Code Description Pages PDF
2010-06-18 APP.FILE.REC Filing Receipt 3 View
2010-05-28 TR.PROV Provisional Cover Sheet (SB16) 2 View
2010-05-28 SPEC Specification 11 View
2010-05-28 CLM Claims 6 View
2010-05-28 ABST Abstract 1 View
2010-05-28 WFEE Fee Worksheet (SB06) 2 View
2010-05-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/349,552
Filed
2010-05-28