Patent Application
Provisional
App. No. 61/352,554
· Confirmation No. 2170
Heated Electrostatic Chuck Including Mechanical Clamp Capability at High Temperature
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2010-06-21 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-06-08 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2010-06-08 | SPEC |
Specification | 11 | View | |
| 2010-06-08 | CLM |
Claims | 5 | View | |
| 2010-06-08 | ABST |
Abstract | 1 | View | |
| 2010-06-08 | APPENDIX |
Appendix to the specification | 14 | View | |
| 2010-06-08 | APPENDIX |
Appendix to the specification | 31 | View | |
| 2010-06-08 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-06-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Perry J.I. Justesen
Beverly, MA
Allan D. Weed
Marblehead, MA
William D. Lee
Newburyport, MA
Ashwin M. Purohit
Gloucester, MA
Robert D. Rathmelt
Murphy, TX
Gary M. Cook
Newton, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- 09 IMP 030
- Confirmation No.
- 2170
Child
Claims priority from a provisional application
→
App. 13/152,735
· US 8,941,968
Filed 2011-06-03
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2011/001033
Filed 2011-06-08
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 13/154,836
· US 8,797,706
Filed 2011-06-07
· Patented Case
FIRST AMENDMENT TO SECURITY AGREEMENT
Recorded 2011-05-10
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Quick Facts
- App. No.
- 61/352,554
- Filed
- 2010-06-08
External Links