IP Library › Patent Application 62663942
Patent Application Provisional Small
App. No. 62/663,942 · Confirmation No. 8854

METHODS TO EVALUATE PATTERNED WAFER BY OPTICAL SECOND HARMONIC GENERATION

Inventor: Ming Lei
Applicant: FemtoMetrix, Inc.
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2018-08-07 APP.FILE.REC Filing Receipt 3 View
2018-08-02 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2018-08-02 WFEE Fee Worksheet (SB06) 2 View
2018-08-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-05-02 APP.FILE.REC Filing Receipt 3 View
2018-05-02 NTC.MISS.PRT Notice to File Missing Parts 2 View
2018-04-27 ADS Application Data Sheet 8 View
2018-04-27 SPEC Specification 5 View
2018-04-27 APPENDIX Appendix to the specification 94 View
2018-04-27 APPENDIX Appendix to the specification 54 View
2018-04-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
62/663,942
Filed
2018-04-27