IP Library › Patent Application 62834289
Patent Application Provisional
App. No. 62/834,289 · Confirmation No. 6838

SUBSTRATE MODIFICATION BY FEMTO-SECOND LASER TO ACHIEVE VARIABLE ETCH DEPTH IN DRY ETCHING

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2019-04-25 APP.FILE.REC Filing Receipt 3 View
2019-04-15 PA.. Power of Attorney 1 View
2019-04-15 PA.. Power of Attorney 1 View
2019-04-15 WFEE Fee Worksheet (SB06) 2 View
2019-04-15 N417 Electronic Filing System Acknowledgment Receipt 3 View
2019-04-15 ADS Application Data Sheet 8 View
2019-04-15 SPEC Specification 29 View
2019-04-15 CLM Claims 1 View
2019-04-15 APPENDIX Appendix to the specification 2 View
2019-04-15 DRW Drawings-only black and white line drawings 7 View
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Quick Facts
App. No.
62/834,289
Filed
2019-04-15