Patent Assignment
Reel/Frame 004562/0171
Assignment of Assignors Interest.
Recorded: 1986-06-09
Pages: 2
Assignor
UCHIMURA, DAVID H.
Executed: 1986-06-03
Assignee
TEGAL CORPORATION
A CORP OF CA, NOVATO, CALIFORNIA
Covered Property
(1)
Plasma Etch Process
Patent:
4,678,540 →
Application:
06/872,073 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.