IP Library Assignment 004562/0171
Patent Assignment
Reel/Frame 004562/0171

Assignment of Assignors Interest.

Recorded: 1986-06-09 Pages: 2
Assignor
UCHIMURA, DAVID H.
Executed: 1986-06-03
Assignee
TEGAL CORPORATION
A CORP OF CA, NOVATO, CALIFORNIA
Covered Property (1)
Plasma Etch Process
Patent: 4,678,540 →
Application: 06/872,073 →
Related Assignments (1)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignors Interest. Aug 9, 1990
From: TEGAL CORPORATION, A CORP. OF DE
To: MOTOROLA, INC., A DE CORP.
Reel/Frame 005439/0781 →