IP Library › Assignment 005439/0781
Patent Assignment
Reel/Frame 005439/0781

Assignment of Assignors Interest.

Recorded: 1990-08-09 Pages: 5
Assignor
TEGAL CORPORATION, A CORP. OF DE
Executed: 1989-12-18
Assignee
MOTOROLA, INC., A DE CORP.
1303 EAST ALGONQUIN ROAD, SCHAUMBURG, ILLINOIS, 60196
Covered Properties (40)
Reactor Apparatus for Plasma Etching or Deposition
Patent: 4,264,393 →
Application: 05/847,349 →
Method for Process Control of a Plasma Reaction
Patent: 4,263,088 →
Application: 06/051,661 →
Apparatus for Controlling a Plasma Reaction
Patent: 4,357,195 →
Application: 06/205,402 →
Plasma Reactor Apparatus and Method
Patent: 4,464,223 →
Application: 06/538,593 →
Cassette Elevator for Use in a Modular Article Processing Machine
Patent: 4,861,222 →
Application: 06/587,860 →
Vacuum Load Lock Apparatus
Patent: 4,632,624 →
Application: 06/588,027 →
Process Monitor and Method Thereof
Patent: 4,611,919 →
Application: 06/588,028 →
Modular Article Processing Machine and Method of Article Handling Therein
Patent: 4,801,241 →
Application: 06/588,029 →
Article Transport Apparatus
Patent: 4,619,573 →
Application: 06/588,030 →
Plasma Reactor Chuck Assembly
Patent: 4,547,247 →
Application: 06/588,031 →
Module Presence Sensor
Patent: 4,575,714 →
Application: 06/588,823 →
Modular Plasma Reactor with Local Atmosphere
Patent: 4,539,062 →
Application: 06/588,853 →
Automatic Shutoff Valve
Patent: 4,547,248 →
Application: 06/588,854 →
Plasma Reactor Removable Insert
Patent: 4,585,920 →
Application: 06/658,468 →
Plasma Reactor Apparatus
Patent: 4,579,618 →
Application: 06/665,098 →
Plasma Reactor Having Slotted Manifold
Patent: 4,590,042 →
Application: 06/685,650 →
Variable Duty Cycle, Multiple Frequency, Plasma Reactor
Patent: 4,585,516 →
Application: 06/707,639 →
Silicon Trench Etch
Patent: 4,857,138 →
Application: 06/719,783 →
Compound Flow Plasma Reactor
Patent: 4,614,639 →
Application: 06/727,937 →
Pin Lift Plasma Processing
Patent: 4,624,728 →
Application: 06/743,341 →
Selective Plasma Etching During Formation of Integrated Circuitry
Patent: 4,687,543 →
Application: 06/832,047 →
Plasma Etch Process
Patent: 4,678,540 →
Application: 06/872,073 →
Dual Wavelength Sensor Which Employs Object as Part of a Corner Reflector
Patent: 4,697,089 →
Application: 06/875,820 →
Optical Process for Determining the End Point of a Process via Analog Multiplication of Photocell Signals
Patent: 4,720,628 →
Application: 06/923,367 →
Process for Polysilicon with Freon 11 and Another Gas
Patent: 4,737,235 →
Application: 06/931,006 →
Electrostatic Wafer Clamp
Patent: 4,724,510 →
Application: 06/941,234 →
Capacitive Feed for Plasma Reactor
Patent: 5,006,760 →
Application: 07/001,773 →
Wafer Cassetts Having Multi-Directional Accdss
Patent: 4,727,993 →
Application: 07/018,770 →
Magnetically Coupled Wafer Lift Pins
Patent: 4,790,258 →
Application: 07/034,121 →
Chrome Mask Etch
Patent: 4,774,164 →
Application: 07/034,250 →
Plasma Reactor with Removable Insert
Patent: 4,793,975 →
Application: 07/045,260 →
Non-Uniform Gas Inlet for Dry Etching Apparatus
Patent: 4,780,169 →
Application: 07/048,344 →
Xenon Enhanced Plasma Etch
Patent: 4,786,359 →
Application: 07/065,746 →
Mass Flow Stabilizer
Patent: 4,958,658 →
Application: 07/066,801 →
Spatula for Wafer Transport
Patent: 4,867,631 →
Application: 07/185,730 →
Switching Current Regulator for Motor Control
Patent: 5,086,492 →
Application: 07/265,304 →
Method and Apparatus for Low Pressure Plasma
Patent: 4,949,670 →
Application: 07/267,193 →
Ignitor for a Microwave Sustained Plasma
Patent: 4,888,088 →
Application: 07/319,020 →
Plasma Etch Isotropy Control
Patent: 4,889,588 →
Application: 07/345,795 →
Spatula for Wafer Transport
Application: 07/377,498 →
Related Assignments (22)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignors Interest. Oct 3, 1983
From: GORIN, GEORGES J.
To: TEGAL CORPORATION, A CA CORP.
Reel/Frame 004182/0885 →
Assignment of Assignors Interest. Mar 9, 1984
From: BROOKS, EDWARD A. JR.; BITHELL, ROGER M.
To: TEGAL CORPORATION A CORP OF CA
Reel/Frame 004310/0502 →
Assignment of Assignors Interest. Mar 9, 1984
From: MIRKOVICH, NINKO T.; ZAJAC, JOHN
To: TEGAL CORPORATION, NOVATO, CA A CORP OF CA
Reel/Frame 004238/0625 →
Assignment of Assignors Interest. Mar 9, 1984
From: MIRKOVICH, NINKO T.
To: TEGAL CORPORATION NOVATO CALIFORNIA A CORP OF CA
Reel/Frame 004239/0954 →
Assignment of Assignors Interest. Mar 12, 1984
From: RUMMEL, PAUL W.
To: TEGAL CORPORATION, A CA CORP.
Reel/Frame 004240/0454 →
Assignment of Assignors Interest. May 4, 1984
From: LACHENBRUCH, ROGER B.; ZAJAC, JOHN P.
To: TEGAL CORPORATION NOVATO CALIFORNIA A CORP OF CA
Reel/Frame 004294/0241 →
Assignment of Assignors Interest. May 18, 1984
From: ZAJAC, JOHN; MIRKOVICH, NINKO T.; RATHMANN, THOMAS M.; LACHENBRUCH, ROGER B.
To: TEGAL CORPORATION A CORP. OF CA
Reel/Frame 004306/0645 →
Assignment of Assignors Interest. May 18, 1984
From: WARENBACK, DOUGLAS H.; RATHMANN, THOMAS M.; MIRKOVICH, NINKO T.
To: TEGAL CORPORATION NAVATO CALIFORNIA A CORP OF CA
Reel/Frame 004288/0431 →
Assignment of Assignors Interest. May 18, 1984
From: RATHMANN, THOMAS M.; DRAKE, HERBERT G.; MIRKOVICH, NINKO T.; LACHENBRUCH, ROGER B.
To: TEGAL CORPORATION A CORP OF CA
Reel/Frame 004293/0403 →
Assignment of Assignors Interest. Jul 1, 1984
From: ZAJAC, JOHN P.
To: TEGAL CORPORATION NOVATO CALIFORNIA
Reel/Frame 004298/0702 →
Assignment of Assignors Interest. Dec 24, 1984
From: DRAGE, DAVID J.
To: TEGAL CORPORATION
Reel/Frame 004352/0494 →
Assignment of Assignors Interest. Mar 4, 1985
From: CORN, GLENN R.; HEGEDUS, ANDREAS G.
To: TEGAL CORPORATION
Reel/Frame 004381/0899 →
Assignment of Assignors Interest. Apr 3, 1985
From: DRAGE, DAVID J.; SAFI, TOUFIC
To: TEGAL CORPORATION
Reel/Frame 004422/0714 →
Assignment of Assignors Interest. Apr 26, 1985
From: HEGEDUS, ANDREAS G.
To: TEGAL CORPORATION, NOVATO, CA A CORP OF CA
Reel/Frame 004399/0506 →
Assignment of Assignors Interest. Jun 11, 1985
From: BITHELL, ROGER M.; SLOMOWITZ, HARRY
To: TEGAL CORPORATION A CORP OF CA
Reel/Frame 004414/0420 →
Assignment of Assignors Interest. Apr 21, 1986
From: BOWKER, CHRISTOPHER D.
To: ZYMOS CORORATION
Reel/Frame 004556/0042 →
Assignment of Assignors Interest. Jun 9, 1986
From: UCHIMURA, DAVID H.
To: TEGAL CORPORATION
Reel/Frame 004562/0171 →
Assignment of Assignors Interest. Jun 18, 1986
From: DRAGE, DAVID J.
To: TEGAL CORPORATION
Reel/Frame 004567/0036 →
Security Agreement Jun 14, 1999
From: TEGAL CORPORATION
To: IMPERIAL BANK
Reel/Frame 010018/0169 →
Security Agreement May 10, 2000
From: TEGAL CORPORATION; TEGAL JAPAN, INC.
To: COAST BUSINESS CREDIT, A DIVISION OF SOUTHERN PACIFIC BANK
Reel/Frame 010785/0795 →
Security Agreement Nov 26, 2002
From: TEGAL CORPORATION
To: SILICON VALLEY BANK
Reel/Frame 013506/0749 →
Security Interest Jul 21, 2003
From: TEGAL CORPORATION
To: HIRSCHMAN, ORIN
Reel/Frame 014242/0813 →