Patent Assignment
Reel/Frame 007673/0954
Assignment of Assignor's Interest
Recorded: 1995-10-19
Pages: 3
Assignor
MORIYA, SHUJI
Executed: 1995-08-30
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Gas Supplying Head and Load Lock Chamber of Semiconductor Processing System
Patent:
5,578,129 →
Application:
08/516,361 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.