Patent Assignment
Reel/Frame 008582/0705
Assignment of Assignor's Interest
Recorded: 1997-05-23
Pages: 3
Assignors
WATANABE,HIROHITO
Executed: 1997-05-16
HIROTA, TOSHIYUKI
Executed: 1997-05-16
OGAWA, TAKASHI
Executed: 1997-05-16
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Capturing Gaseous Impurities and Semiconductor Device Manufacturing Apparatus
Patent:
5,863,602 →
Application:
08/862,398 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.