Assignment of Assignor's Interest

Recorded: 1998-06-17 Pages: 3

Assignor

HATANO, TATSUO

Executed: 1998-06-04

Assignee

TOKYO ELECTRON LIMITED

3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN

Covered Property (1)

Cleaning Processing Method of a Film Forming Apparatus

Patent: 5,954,887 →

Application: 09/098,987 →

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.