Patent Assignment
Reel/Frame 009842/0632
Assignment of Assignor's Interest
Recorded: 1999-03-22
Pages: 2
Assignor
HALBMAIER, DAVID L.
Executed: 1999-02-25
Assignee
FLUOROWARE, INC.
102 JONATHAN BOULEVARD, CHASKA, MINNESOTA, 55318
Covered Property
(1)
Method of Clean a Wafer Carrier
Patent:
6,248,177 →
Application:
09/227,702 →
Related Assignments
(6)
Other recorded transfers of the patent in this record — the chain of ownership.
Merger
Jul 22, 2002
From: FLUOROWARE, INC.
To: ENTEGRIS, INC.
Reel/Frame 013110/0595 →
Asset Purchase Agreement
May 10, 2011
From: ENTEGRIS, INC.
To: POLY-FLOW ENGINEERING, LLC
Reel/Frame 026255/0867 →
Assignment of Assignor's Interest
Mar 19, 2012
From: POLY-FLOW ENGINEERING, LLC
To: AIR PRODUCTS AND CHEMICALS, INC.
Reel/Frame 027884/0924 →
Patent Security Agreement
Oct 27, 2016
From: VERSUM MATERIALS US, LLC
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 040503/0442 →
Assignment of Assignor's Interest
Feb 20, 2017
From: AIR PRODUCTS AND CHEMICALS, INC.
To: VERSUM MATERIALS US, LLC
Reel/Frame 041772/0733 →
Release of Security Interest
Oct 7, 2019
From: CITIBANK, N.A., AS AGENT
To: VERSUM MATERIALS US, LLC
Reel/Frame 050647/0001 →