Patent Assignment
Reel/Frame 010328/0573
Assignment of Assignor's Interest
Recorded: 1999-10-18
Pages: 3
Assignee
ATMI ECOSYS CORPORATION
617 RIVER OAKS PARKWAY, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Fluorine Abatement Using Steam Injection in Oxidation Treatment of Semiconductor Manufacturing Effluent Gases
Patent:
6,423,284 →
Application:
09/420,080 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 1, 2000
From: ATMI ECOSYS CORPORATION
To: ADVANCED TECHNOLOGY MATERIALS, INC.
Reel/Frame 010656/0217 →
Assignment of Assignor's Interest
Aug 30, 2005
From: ADVANCED TECHNOLOGY MATERIALS, INC.
To: APPLIED MATERIALS, INC.
Reel/Frame 016937/0211 →
Assignment of Assignor's Interest
Apr 13, 2012
From: APPLIED MATERIALS, INC.
To: BHT SERVICES PTE. LTD.
Reel/Frame 028045/0762 →