Patent Assignment
Reel/Frame 011036/0986
Assignment of Assignor's Interest
Recorded: 2000-08-11
Pages: 2
Assignor
KLEINSCHMIDT, JUERGEN
Executed: 2000-08-03
Assignee
LAMBDA PHYSIK AG
HANS-BOECKLER-STRASSE 12, D-37079 GOETTINGEN, GERMANY
Covered Property
(1)
Reduction of Laser Speckle in Photolithography by Controlled Disruption of Spatial Coherence of Laser Beam
Patent:
6,898,216 →
Application:
09/574,921 →
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.