Patent Assignment
Reel/Frame 024898/0109
Change of Name
Recorded: 2010-08-27
Pages: 9
Assignor
LAMBDA PHYSIK AG
Executed: 2000-06-09
Assignee
COHERENT LAMBDA PHYSIK GMBH
HANS-BOECKLER-STRASSE 12, GOETTINGEN, D-37079, GERMANY
Covered Properties
(64)
Laser for Generating Narrow-Band Radiation
Patent:
5,761,236 →
Application:
08/687,793 →
Precision Variable Delay Using Saturable Inductors
Patent:
6,005,880 →
Application:
08/822,451 →
Laser System and Method for Narrow Spectral Linewidth Through Wavefront Curvature Compensation
Patent:
6,061,382 →
Application:
09/073,070 →
Diode Pumped Laser with Frequency Conversion into Uv and Duv Range
Patent:
6,002,697 →
Application:
09/139,214 →
Stabilization of Angular and Lateral Laser Beam Position
Patent:
6,014,206 →
Application:
09/162,424 →
Wavelength Selector for Laser with Adjustable Angular Dispersion
Patent:
6,393,037 →
Application:
09/244,554 →
Fz (157NM) Laser Employing Neon as the Buffer Gas
Patent:
6,157,662 →
Application:
09/317,526 →
Molecular Fluorine (F2) Laser with Narrow Spectral Linewidth
Patent:
6,154,470 →
Application:
09/317,527 →
F2-Laser with Line Selection
Patent:
6,345,065 →
Application:
09/317,695 →
Performance Control System and Method for Gas Discharge Lasers
Patent:
6,212,214 →
Application:
09/379,034 →
Method and Procedure to Automatically Stabilize Excimer Laser Output Parameters
Patent:
6,490,307 →
Application:
09/447,882 →
Narrow Band Excimer or Molecular Fluorine Laser with Adjustable Bandwidth
Patent:
6,298,080 →
Application:
09/452,353 →
Discharge Unit for a High Repetition Rate Excimer or Molecular Fluorine Laser
Patent:
6,466,599 →
Application:
09/453,670 →
Very Stable Excimer Or Molecular Fluorine Laser
Patent:
6,243,405 →
Application:
09/484,818 →
Energy Monitor for F2 Molecular Fluorine Laser and Method of Energy Stabilization
Patent:
6,819,698 →
Application:
09/512,417 →
Energy Stabilized Gas Discharge Laser
Patent:
6,714,577 →
Application:
09/513,025 →
Surface Preionization for Gas Lasers
Patent:
6,456,643 →
Application:
09/532,276 →
Optical Pulse Stretching and Smoothing for Arf and F2 Lithography Excimer Lasers
Patent:
6,389,045 →
Application:
09/550,558 →
Reduction of Laser Speckle in Photolithography by Controlled Disruption of Spatial Coherence of Laser Beam
Patent:
6,898,216 →
Application:
09/574,921 →
Roof Configuration for Laser Discharge Electrodes
Patent:
6,546,036 →
Application:
09/587,996 →
Narrow Band Excimer Laser with a Prism-Grating as Line-Narrowing Optical Element
Patent:
6,795,473 →
Application:
09/602,184 →
Excimer laser with line narrowing
Patent:
6,476,987 →
Application:
09/629,256 →
Excimer or Molecular Laser with Optimized Spectral Purity
Patent:
6,785,316 →
Application:
09/640,595 →
Temperature Compensation Method for Wavemeters
Patent:
6,667,804 →
Application:
09/686,483 →
Performance control system and method for gas discharge lasers
Patent:
6,330,267 →
Application:
09/718,805 →
157 Nm Laser System and Method for Multi-Layer Semiconductor Failure Analysis
Laser Gas Replenishment Method
Tunable Laser with Stabilized Grating
Narrow Band Excimer or Molecular Fluorine Laser with Adjustable Bandwidth
Narrow Band Excimer or Molecular Fluorine Laser with Adjustable Bandwidth
Excimer or Molecular Fluorine Laser Having Lengthened Electrodes
Blower for Gas Laser
Patent:
6,847,671 →
Application:
09/823,298 →
Discharge Unit for a High Repetition Rate Excimer or Molecular Fluorine Laser
Discharge Unit for a High Repetition Rate Excimer or Molecular Fluorine Laser
Stabilization Technique for High Repetition Rate Gas Discharge Lasers
Electrical Excitation Circuit for a Pulsed Gas Laser
Precise Monitor Etalon Calibration Technique
Patent:
6,807,205 →
Application:
09/903,425 →
Wavelength Selector for Laser with Adjustable Angular Dispersion
Patent:
6,614,828 →
Application:
09/920,008 →
Gain Module for Diode-Pumped Solid State Laser and Amplifier
Laser System and Method for Spectral Narrowing Through Wavefront Correction
Resonator Optics for High Power Uv Lasers
Patent:
6,868,106 →
Application:
10/001,954 →
Resonator Arrangement for Bandwidth Control
Method and Apparatus for Reduction of Spectral Fluctuations
Patent:
6,792,023 →
Application:
10/112,660 →
Laser Gas Replenishment Method
Laser Gas Replenishment Method
Laser Gas Replenishment Method
Molecular Fluorine Laser with Intracavity Polarization Enhancer
Patent:
6,834,069 →
Application:
10/162,115 →
High Power Excimer or Molecular Fluorine Laser System
Patent:
6,768,765 →
Application:
10/163,098 →
Method and Apparatus for Compensation of Beam Property Drifts Detected by Measurement Systems Outside of an Excimer Laser
Patent:
6,822,977 →
Application:
10/165,767 →
On-Line Quality Control of the Key Optical Components in Lithography Lasers Using Laser Induced Fluorescence
Patent:
6,839,375 →
Application:
10/236,036 →
Laser Gas Replenishment Method
Absolute Wavelength Calibration of Lithography Laser Using Multiple Element or Tandem See Through Hollow Cathode Lamp
Duv and Vuv Laser with on-Line Pulse Energy Monitor
System and Method for Delay Compensation for a Pulsed Laser
Excimer or Molecular Fluorine Laser System with Precision Timing
Reduced-Maintenance Excimer Laser with Oil-Free Solid State Pulser
Systems and Methods Utilizing Laser Discharge Electrodes with Ceramic Spoilers
Excimer or Molecular Fluorine Laser with Several Discharge Chambers
Master Oscillator/Power Amplifier Excimer Laser System with Pulse Energy and Pointing Control
Temperature Control Systems for Excimer Lasers
Mopa Excimer or Molecular Fluorine Laser System with Improved Synchronization
Master-Oscillator Power-Amplifier (Mopa) Excimer or Molecular Fluorine Laser System with Long Optics Lifetime
Laser Gas Replenishment Method
Master-Oscillator Power-Amplifier (Mopa) Excimer or Molecular Fluorine Laser System with Long Optics Lifetime
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jul 18, 1996
From: KLEINSCHMIDT, JURGEN; HEIST, PETER
To: LAMBDA PHYSIK GESELLSCHAFT ZUR HERSTELLUNG VON LASERN MBH
Reel/Frame 008128/0303 →
Assignment of Assignor's Interest
Oct 30, 1997
From: BASTING, DIRK; VON BERGMANN, HURBERTUS
To: LAMBDA PHYSIK GMBH
Reel/Frame 008774/0150 →
Assignment of Assignor's Interest
Jun 22, 1998
From: GOVORKOV, SERGEI V.; BASTING, DIRK
To: LAMBDA PHYSIK GMBH
Reel/Frame 009277/0007 →
Assignment of Assignor's Interest
Sep 21, 1998
From: GOVORKOV, SERGEI V.; STAMM, UWE; ZSCHOCKE, WOLFGANG V.; SCHRODER, THOMAS
To: LAMBDA PHYSIK GMBH
Reel/Frame 009471/0514 →
Assignment of Assignor's Interest
Nov 23, 1998
From: BASTING, DIRK; STAMM, UWE; MANN, KLAUS; OHLENBUSCH, JENS
To: LAMBDA PHYSIK GMBH
Reel/Frame 009604/0996 →
Assignment of Assignor's Interest
Mar 29, 1999
From: BASTING, DIRK; GOVORKOV, SERGEI V.
To: LAMBDA PHYSIK GMBH
Reel/Frame 009870/0647 →
Assignment of Assignor's Interest
Jul 26, 1999
From: BASTING, DIRK; GOVORKOV, SERGEI V.; STAMM, UWE
To: LAMBDA PHYSIK GMBH
Reel/Frame 010116/0936 →
Assignment of Assignor's Interest
Aug 2, 1999
From: SCAGGS, MICHAEL; VOSS, FRANK
To: LAMBDA PHYSIK GMBH
Reel/Frame 010136/0159 →
Assignment of Assignor's Interest
Sep 13, 1999
From: KLEINSCHMIDT, JURGEN; HEIST, PETER; VOSS, FRANK; GORTLER, ANDREAS
To: LAMBDA PHYSIK GMBH
Reel/Frame 010223/0953 →
Assignment of Assignor's Interest
Feb 28, 2000
From: BRAGIN, IGOR; BERGER, VADIM; STAMM, UWE; REBHAN, ULRICH
To: LAMBDA PHYSIK GMBH
Reel/Frame 010646/0651 →
Assignment of Assignor's Interest
Mar 6, 2000
From: BECKER DE MOS, BRUNO; STAMM, UWE; VOGLER, KLAUS
To: LAMBDA PHYSIK GMBH
Reel/Frame 010656/0154 →
Assignment of Assignor's Interest
Mar 13, 2000
From: HEIST, PETER; KLEINSCHMIDT, JURGEN
To: LAMBDA PHYSIK GESELLSCHAFT ZUR HERSTELLUNG VON LASERN MBH
Reel/Frame 010677/0414 →
Assignment of Assignor's Interest
May 1, 2000
From: BORNEIS, STEFAN; BRUNWINKEL, KLAUS; STAMM, UWE; VOSS, FRANK
To: LAMBDA PHYSIK GESELLSCHAFT ZUR HERSTELLUNG VON LASERN MBH
Reel/Frame 010793/0594 →
Assignment of Assignor's Interest
May 30, 2000
From: STAMM, UWE; BRAGIN, IGOR; ZSCHOCKE, WOLFGANG
To: LAMBDA PHYSIK GESELLSCHAFT ZUR HERSTELLUNG VON LASERN MBH
Reel/Frame 010858/0431 →
Assignment of Assignor's Interest
Jun 19, 2000
From: VOGLER, KLAUS
To: LAMBDA PHYSIK GESELLSCHAFT ZUR HERSTELLUNG VON LASERN MBH
Reel/Frame 010914/0522 →
Assignment of Assignor's Interest
Jun 21, 2000
From: OSMANOW, RUSTEM; STAMM, UWE
To: LAMBDA PHYSIK AG
Reel/Frame 010922/0455 →
Assignment of Assignor's Interest
Aug 11, 2000
From: KLEINSCHMIDT, JUERGEN
To: LAMBDA PHYSIK AG
Reel/Frame 011036/0986 →
Assignment of Assignor's Interest
Sep 1, 2000
From: VOGLER, KLAUS WOLFGANG; HEIST, PETER
To: LAMBDA PHYSIK AG
Reel/Frame 011067/0672 →
Assignment of Assignor's Interest
Oct 2, 2000
From: BERGER, VADIM; BRAGIN, IGOR
To: LAMBDA PHYSIK AG
Reel/Frame 011151/0152 →
Assignment of Assignor's Interest
Oct 3, 2000
From: KLEINSCHMIDT, JUERGEN; HEIST, PETER; KRAMER, MATTHIAS
To: LAMBDA PHYSIK AG
Reel/Frame 011157/0992 →
Assignment of Assignor's Interest
Nov 6, 2000
From: BRAGIN, IGOR; BERGER, VADIM; STAMM, UWE
To: LAMBDA PHYSIK AG
Reel/Frame 011217/0704 →
Assignment of Assignor's Interest
Dec 7, 2000
From: KLEINSCHMIDT, JUERGEN; SCHROEDER, THOMAS
To: LAMBDA-PHYSIK AG
Reel/Frame 011353/0355 →
Assignment of Assignor's Interest
Jan 26, 2001
From: KLEINSCHMIDT, JUERGEN
To: LAMBDA PHYSIK AG
Reel/Frame 011471/0162 →
Assignment of Assignor's Interest
Feb 9, 2001
From: MANN, KLAUS; SCHRODER, THOMAS; SCHAFER, BERND; LEINHOS, UWE
To: LAMBDA PHYSIK AG
Reel/Frame 011503/0364 →
Change of Name
May 3, 2001
From: LAMBDA PHYSIK GMBH
To: LAMBDA PHYSIK AG
Reel/Frame 011783/0175 →