IP Library › Granted Patent US 6,414,978
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Granted Patent Utility
US 6,414,978 · Confirmation No. 3682

DISCHARGE UNIT FOR A HIGH REPETITION RATE EXCIMER OR MOLECULAR FLUORINE LASER

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Quick Facts
Patent No.
US 6,414,978
App. No.
09/826,296
Filed
2001-04-03
Granted
2002-07-02
Pub. No.
US20010030986A1
Art Unit
2828
PTA
-62 days