IP Library Patent Application 10165767
Patent Application Utility
App. No. 10/165,767 · Confirmation No. 5756

METHOD AND APPARATUS FOR COMPENSATION OF BEAM PROPERTY DRIFTS DETECTED BY MEASUREMENT SYSTEMS OUTSIDE OF AN EXCIMER LASER

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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2011-04-19 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2010-10-18 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-10-18 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-10-08 PA.. Power of Attorney 1 View
2010-10-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-10-08 TRAN.LET Transmittal Letter 1 View
2010-10-08 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2009-08-05 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-10-01 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-10-01 SPEC Specification 1 View
2004-10-01 BIB Bibliographic Data Sheet 1 View
2004-08-27 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-08-27 LET. Miscellaneous Incoming Letter 1 View
2004-08-27 OATH Oath or Declaration filed 3 View
2004-07-01 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-01 NOA Notice of Allowance and Fees Due (PTOL-85) 5 View
2004-07-01 1449 List of References cited by applicant and considered by examiner 2 View
2004-07-01 892 List of references cited by examiner 1 View
2004-07-01 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-07-01 FWCLM Index of Claims 1 View
2004-07-01 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-23 SRNT Examiner's search strategy and results 1 View
2004-05-27 CFILE Request for Corrected Filing Receipt 9 View
2004-05-27 C.AD Change of Address 1 View
2004-05-10 C.AD Change of Address 1 View
2003-07-29 WFEE Fee Worksheet (SB06) 1 View
2003-05-23 PA.. Power of Attorney 2 View
2003-05-16 PA.. Power of Attorney 2 View
2002-11-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2002-11-01 CFILE Request for Corrected Filing Receipt 4 View
2002-11-01 LET. Miscellaneous Incoming Letter 3 View
2002-10-22 PEFN Pre-Exam Formalities Notice 2 View
2002-10-15 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2002-10-15 FOR Foreign Reference 36 View
2002-09-04 PEFR Applicant Response to Pre-Exam Formalities Notice 5 View
2002-09-04 CFILE Request for Corrected Filing Receipt 4 View
2002-09-04 DRW Drawings-only black and white line drawings 4 View
2002-09-04 TRNA Transmittal of New Application 4 View
2002-09-04 DRW Drawings-only black and white line drawings 4 View
2002-07-09 PEFN Pre-Exam Formalities Notice 2 View
2002-06-06 TRNA Transmittal of New Application 3 View
2002-06-06 SPEC Specification 13 View
2002-06-06 CLM Claims 13 View
2002-06-06 ABST Abstract 1 View
2002-06-06 DRW Drawings-only black and white line drawings 4 View
2002-06-06 TRNA Transmittal of New Application 3 View
2002-06-06 SPEC Specification 13 View
2002-06-06 CLM Claims 13 View
2002-06-06 ABST Abstract 1 View
2002-06-06 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
App. No.
10/165,767
Filed
2002-06-06
Granted
2004-11-23
Art Unit
2828
PTA
-89 days