Patent Application
Utility
App. No. 09/811,354
· Confirmation No. 7784
METHOD AND APPARATUS FOR COMPENSATION OF BEAM PROPERTY DRIFTS DETECTED BY MEASUREMENT SYSTEMS OUTSIDE OF AN EXCIMER LASER
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-07-07 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-07-07 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2003-07-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-07-03 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2001-06-22 | A.PE |
Preliminary Amendment | 4 | View | |
| 2001-03-16 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-03-16 | SPEC |
Specification | 13 | View | |
| 2001-03-16 | CLM |
Claims | 13 | View | |
| 2001-03-16 | ABST |
Abstract | 1 | View | |
| 2001-03-16 | DRW |
Drawings-only black and white line drawings | 4 | View |
Inventors
Uwe Stamm
Goettingen, GERMANY
Hans-Stephan Albrecht
Goettingen, GERMANY
Guenter Nowinsk
Unterwellenborn, GERMANY
Attorneys & Agents of Record
Classification
USPC
372/57
Prosecution
- Examiner
- PALADINI, ALBERT WILLIAM
- Art Unit
- 2125
- Customer No.
- 28584
- Docket No.
- LMPY-12220[267/U]
- Confirmation No.
- 7784
Publication
- Pub. No.
- US20010042840A1
- Pub. Date
- 2001-11-22
Patent Term Adjustment
-19days
Parent
Claims priority from a provisional application
→
App. 60/189,729
Filed 2000-03-16
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/223,070
Filed 2000-08-04
· Provisional Application Expired
Child
is a Continuation in-part of
→
App. 10/165,767
· US 6,822,977
Filed 2002-06-06
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-07-03
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Quick Facts
- App. No.
- 09/811,354
- Filed
- 2001-03-16
- Granted
- 2003-09-09
- Pub. No.
- US20010042840A1
- Examiner
- PALADINI, ALBERT WILLIAM
- Art Unit
- 2125
- PTA
- -19 days
External Links